Electric Rotary Table

R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

PFxx-OMY0005

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1) (Station n) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=16 19.5 (Pitch) P=17 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 19.5 Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 Station 20 350 341 335 369 360 354 3 78 69 63 80 71 65 4 94 85 79 97 88 82 5 110 101 95

MK

1 4 Note 1) Above figure is for D-A73/A80.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Manifolds VV5Q J 1 3 08 U0 N ( 00T ) For P, R port inch sizes Kit designation Flip, Plug-in Series VQ1000 1 2 3 Electrical entry/Cable length Stations 1 station 1 2 01 Top entry Side entry Note 1) Stations Kit, Cable length U side U0 S0 Flat cable kit (20P) Without cable 1 to 8 (16) 16 stations 16 n Note 1) Numbers inside ( ) indicate the maximum number of solenoids for mixed

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

Low Profile Guide Type

Bore size (mm) Allowable kinetic energy for intermediate stop Es (J) 10 0.03 15 0.13 25 0.45 1548 Model Selection CY1F Series Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Item Note Review m m max is the maximum load mass at a 1.

CYV

finds the load factors (n) of the items below, where the total (n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Quantity SI (metric) unit U.S. customary unit Mass 1 [kg] 2.2046 [lb] Length 1 [mm] 0.03937 [in] Torque 1 [Nm] 141.6 [ozin] Moment of inertia 1 [( 10-4 kgm2)] 5.4675 [ozin2] Load (thrust load/axial load) 1 [N] 0.2248 [lbf] Temperature N [C] 9/5 + 32 N [F] A 9 CONTENTS 1.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

3 2-Rc 1/8 (Pilot EXH port) 3 2-Rc 1/8 (Pilot EXH port) 38 70 38 53 Formula L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) Formula L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) L n Dimensions L n Dimensions 8 263 276 L1 L2 7 238 251 8 263 276 L1 L2 6 213 226 7 238 251 5 188 201 6 213 226 4 163 176 5 188 201 3 138 151 4 163 176 1 2 113 126 3 138 151 1 2 113

SMC Pneumatic Clean Series

M6.5 1 10 100 1000 10 10 The number of particles larger than 0.1 m in an air volume of 1m3 is expressed in 10 N.

Standard Combinations

Metal bowl B B B B B Dimensions B B N.O.: Black B N.C.: Gray 1/8 10 One-touch fitting 1/4 Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D N P E G H1 H2 J K L L M (1) (1) (1) (1) (1) (1) ACG20B ACG30B ACG40B 1/8, 1/4 83 87 29 60 2.5 28.5 41.5 30 3.2 1/4, 3/8 110 115 41 80 2.5 29.5 55 41

Lock unit

Unlocked condition can be held in reversed order of Fig. 8. of the release bolt 3240 3 5063 4 80100 5 16 - W a r n i n g (1) Do not operate the release bolt until safety is confirmed.

CJ2X/CUX/CQSX/CQ2X/CM2X

2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

2 pcs. 1 pc. n pcs.

E-ITV-STD-RF-A

ZERO CLEAR I N I TI ALI ZE N ot e 1: Pl ease ref er t o each cont ent s about operat i on m et hode. N ot e 2: The f unct i on of t he set t i ng of preset pressure i s preset i nput t ype onl y.

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8