Series: 2 (VQ21), Body Style: M (For Manifold), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet), Voltage Protection: Z (DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting)

Series: 2 (VQ21), Body Style: M (For Manifold), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Voltage Protection: Z (DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting)

Manifold Specifications

A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 130 58 24.4 9 9 R3 SY A 2 4 18 13 SMC SMC 4 Cover diameter 1.6 Cross section 0.34mm2 B SYJ 2-C6, C8, C10, 02 38 23.4 Mounting holes Manual override C6: One-touch fittings for 6 SX C8: One-touch fittings for 8 M5 X 0.8 External pilot port (Only external pilot style(R)) C10: One-touch fittings for 10 VK 02: Rc(PT)1/4 VZ (C6, C8) 17.5 10.5

Plug-in Unit

SMC SMC SMC 95.5 101 20.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 SQ 72 12 60 43.5 42.7 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 15.7 21.5 (6.5) 11.5 VQ4 External pilot port 2-Rc 1/8 Pilot exhaust port 2-Rc1/8 27 31 38.7 VQ5 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> P=25 65.5 Rc 1/4: 1/4" Female thread VQZ Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 :

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

C10: One-touch fitting for 10 C8: One-touch fitting for 8 Rc 3/8: Rc 3/8 thread Rc 1/4: Rc 1/4 thread 2n-Rc 1/4, 3/8, C8, C10, C12 {4(A), 2(B)} B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A 6 B A B A 4 2 Manual override B A 5 B A B A 6.5 L1 2 4 B A 4 B A B A 2 4 B A B A 3 B A D side 2 4 B A 2 A A 2 4 B A 1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

Intrinsically Safe Valve

4 1 1/4 53-SY9000 1 (P) (EA) 5 3 (EB) 3/8 One-touch fitting (Metric size) Note) 2-position double F2: With side bracket 2 (B) (A) 4 Symbol Port size Applicable series 2 C4 C6 C8 C8 C10 C8 C10 C12 4 One-touch fitting (EA) 5 1 (P) 3 (EB) 6 One-touch fitting 53-SY5000 8 One-touch fitting 3-position closed center 2 (B) (A) 4 8 One-touch fitting 3 Note 1) 53-SY7000 10 One-touch fitting Bracket

0.

for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 stations Note) Weight for threaded connection.

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.

5 Port Solenoid Valve

x M4 Mounting hole Connector for Handheld Terminal End plate n 8 7 6 5 4 3 2 D side U side Stations 1 3/4" 3(R) port 1/2" 1(P) port 30 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 11.5 12 1/8" External pilot port 15.7 27.9 33.5 1/8" PE. port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 37.5 45.2

Bottom

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2 B 2 P = 25 P = 25 4 A 2 B 1 44 50.5 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side Manual override 15 12 16.5 Indicator light 43.5 2-5-32 Base Mounted Series

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-1 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

actuation Port size {2(A) port} (A) 2 N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

123 5 91 102 125 135.5 6 107 118 137.5 148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4)

5 Port Air Operated Valve SYA3000/5000/7000 Series

SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position single SYA7120(-F2) C8, N9 C10, N11 Foot bracket SYA7120-F1 C8, N9 C10, N11 57 87.5 46 M5 x 0.8 (Pilot port) 77.5 B 19.8 13.6 28 38 A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) Manual override 2 x 4.2 (For mounting) 15 7 42 (66) 2 x 4.2 (For mounting)