Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Universal type Port size in the cylinder side 6 8 12 10 4 (1) AS22 1FE-01 AS23 1FE-01 R 1/8 AS22 1FE-02 AS23 1FE-02 R 1/4 AS32 1FE-03 AS33 1FE-03 R 3/8 AS42 1FE-04 AS43 1FE-04 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Symbol How to Order 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D. (mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

Body Ported Type Vacuum Ejector ZH Series

EXH. port Silencer part no. 06 AN10-C06 07 AN10-C07 08 AN15-C08 09 AN15-C08 10 AN20-C10 11 AN20-C11 12 AN30-C12 ZHP ZU Female threads Metric size Inch size 01 Rc1/8 N01 NPT1/8 02 Rc1/4 N02 NPT1/4 03 Rc3/8 N03 NPT3/8 04 Rc1/2 N04 NPT1/2 VQD-V Standard bracket Note Refer to Table 1 and Table 2 for the combination available for SUP., VAC. and EXH. port connection.

AMR3000 to 6000

Regulator with Mist Separator AMR3000 to 6000 Series (Part number for one piece) How to Order Adapter Assembly 03 AMR 4 0 00 02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ 1 None With auto drain 0 MR unit Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

0.4

(Not applicable to Gateway unit) VQ7 Connector type manifold Connector wiring diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

INSTALLATION 2 1 to 2 6 2.1 Installation direction and clearances . 2 2 2.2 Keep out foreign materials . 2 3 2.3 Cable stress . 2 4 2.4 SSCNET cable laying. 2 4 2.5 Inspection items . 2 6 2.6 Parts having service lives . 2 6 3.

10

Applicable fluid 1 Model Air Water Oil Steam Medium vacuum For Air For Air VX2 0 Page 5 2 For Medium vacuum For Medium vacuum VX2 4 Page 10 2 For Water For Water VX2 2 Page 14 2 2 For Oil For Oil VX2 3 Page 16 Can be used with heated water. 2 2 2 For Steam For Steam VX2 5 Page 18 1 For details, refer to pages 45 and 46. 2 Refer to the individual specifications for each fluid.

Plug-in/Plug Lead: Single Unit

(Except double wiring) Name plate Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure Nil CD1 (2) CD2 (2) CU1 (2) CU2 (2) K (4) N SD (2) SU (2) W 5 VQ5000 D U D side mounting U side mounting Manifold 1 Plug-in unit Stations 02 2 stations Cylinder port 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed 12 12 stations Note 1)

VQ5000

(Except double wiring) Name plate Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure Nil CD1 (2) CD2 (2) CU1 (2) CU2 (2) K (4) N SD (2) SU (2) W 5 VQ5000 D U D side mounting U side mounting Manifold 1 Plug-in unit Stations 02 2 stations Cylinder port 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed 12 12 stations Note 1)

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

CATALOG VC10

PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 58 FLOW CHARTS 97 SOLENOID VALVES . . .

Plug-in Unit

Negative COM. 2-2-50 Base Mounted Series VQC Plug-in Unit VV5QC41 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 2-G 3/4 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 77.5 45.5 42.7 15.7 72 SQ 12 20.5 43.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 35 11.5 2-Rc 1/8 (Pilot EXH port) 2-Rc 1/8 (External pilot port) (6.5) 21.5 27 31 38.7 VQ4 VQ5 2n-Rc 1/4, 3/8, C8, C10

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-W058

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

HRX-OM-R016

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.