Series AK1000

200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 0.41 60 45 0.31 0.34 50 0.28

Compact manifold regulator ARM5 Series

200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-309

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Specification: 22 (Copper, Flourine and Silicon Free + Low Particle Generation, Vacuum Suction Type), Bore Size: Ø12, Stroke: 25mm, Adjuster: C (Metal Stopper), Magnet: W/Magnet and Rail, Auto Switch: M9NW (Solid State, 2-color Indication, 3 Wire NPN, Horizontal), Lead Wire: L (3m), Number: 3 pcs.

Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal

Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal

Bearing Type: L (Ball Bushing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 125 mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m [Or None in the Case of No Switch], Number: S (1 pc.]

Bearing Type: L (Ball bushing bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal

Bearing Type: L (Ball bushing bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 20mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal

Bearing Type: M (Slide bearing), Bore Size: 20mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 200mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bearing Type: L (Ball bushing bearing), Bore Size: 25mm, Port Type: TN (NPT), Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Type: L (Ball bushing bearing), Bore Size: 32mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing Type: L (Ball bushing bearing), Bore Size: 40mm, Port Type: TN (NPT), Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal

Bearing Type: L (Ball bushing bearing), Bore Size: 50mm, Port Type: TN (NPT), Stroke: 175mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing Type: M (Slide bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 150mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)