SMC Corporation of America
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Operating condition Impacting object weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S m Nm C m/s kg

For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.

For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.

5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 MLUB25 MLUB32 MLUB40 MLUB50 14 15.5 16 21.5 7.5 depth 4.5 9 depth

Vespel is a registered trademark of DuPont. 29 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5800 For UHP gas delivery Inlet pressure: Max. 300 psig (2.1 MPa) Flow capacity to 200 slpm Body material: 316L SS secondary remelt Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL58 S M FV4 FV4 02 2PW Delivery pressure Bonnet option

r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Electrical entry M M-type plug connector with lead wire (300 mm) MO M-type plug connector without connector Number of auto switches Nil S N 2 pcs. 1 pc. n pcs. Rated voltage 5 6 24 VDC 12 VDC For lead wire lengths other than 300 mm, refer to the plug connector lead wire (page 5). Applicable Auto Switches / Refer to pages 14 through to 16 for detailed auto switch specifications.

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

2 r o t !1 i !3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

Connecting bracket A Connecting bracket B Pressure outlet port assembly Bushing projection Connecting bracket A r Mount the connecting bracket A, and tighten the hexagon socket head cap screw with the following torque.

400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

Note 4) For external pilot option, -R, indicate the external pilot specification R for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.