MHF2

71 6 MHS 62 86 MHC 33 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 56 MHT Mounting thread E 13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

MHF2

6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) F9NWZ Auto switches marked are produced upon receipt of order. 11-6-5 6 Series CRJ Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air (Non-lube) Max. operating pressure 0.7 MPa Min. operating pressure 0.15 MPa 0 to 60C (No freezing) Ambient and fluid temperature

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) F9NWZ Auto switches marked are produced upon receipt of order. 11-6-5 6 Series CRJ Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air (Non-lube) Max. operating pressure 0.7 MPa Min. operating pressure 0.15 MPa 0 to 60C (No freezing) Ambient and fluid temperature

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Lead wire length symbols: 0.5 mNil(Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN CA2 CS1 For details about auto switches with pre-wire connector, refer to page 6-16-60.

Cylinder with Lock Series CNS

Load in direction of rod extension Load in direction of rod retraction m from 0.3MPa Graph 5 F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 14 Series CNS Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 3000 3000 2000 2000 1000 1000 160 700 800 900 700 800 900 Load weight: m(kg) Load weight: m(kg) 140 600 600 125 P125 500 500 400 400 160 300 300 140 125 200 200 100 500 400 300

ML1

6 !7 !8 !

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filter 150/30 (8.3 2000Hz) Impact/Vibration m/s2 Grommet, L and M type plug connector Electrical Entry Check Valve 24, 12, 6, 5, 3 Coil rated voltage VDC Exhaust Silencer E -10 to +10% Allowable voltage Valve System A B 0.5 (with light: 0.55) Power consumption (W) Oxygen Output P Heat Exchanger Air Inlet Compressor Filter assembly Valve System circuit To sieve Tank 2 To sieve Tank 2 To sieve

PF2D

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

MGP

M E k + = = 1 4 .. a Ek J M kg m kg ms ms 1 0.5m/s801000.4m/s 2 3 9. 1 2 3 3 4 5 1 5 10. 1 2 3 4 5 6 7 8 9 10 11. 1 (d=) 6 11-1. 1 1 2 3005mm 4 5 6 7 2d(MGPS1.5d MGP MGPS (d=) (d=) (mm) (mm) 7 11-1. 13 34 (mm) 3mm 20,25,32,40 16 JIS B46481.5 50,63 JIS B46482.5 80,100 JIS B4648 2 3) 12. 12-1. 2 12-2. 1) 1) 2 3) 1ISOVG32 8 4 0.7 12-3.

3 Way,3 Port Solenoid Valve NVZ Series

(L) M typ plug connector (M)

NVZseies

(L) M typ plug connector (M) World Wide QS\E Support...

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

Multistage Ejector Series ZL112/212 1

For EE (ZSE4E) 24 V 12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Profile Design ISO/VDMA Air Cylinder Series CP95

Example: Cylinder diameter: 50 mm Stroke: 600 mm Working pressure: 0.5 MPa Cycles: 5 per minute Bore size: 6 mm Piping length (between the cylinder and the valve): 2 m 6.Extend the intersection point 1 upward to a 6 piping bore size. Intersection point 2 is obtained. 7.Extend the intersection point 2 rightward or leftward.

MHF2

6 Parts list Parts list Note Material No. Description No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 35.8 36 Blue A 40 5 1 UNIT 12 to 24 VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.