Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1, 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply a wrench only to the metal part of the piping when installing the flow switch onto the system piping.
(mm) ZCU 24 VDC 24 VDC Supply voltage AMJ Suction filter unit ZX1-F Operating pressure range Vacuum to 0.5 MPa Misc. 30 m Filtration Air supply port M5 (Standard)/M6 (Option) Unit Manifold Vacuum pad connection port M5 (Standard)/M6 (Option) Air supply port Rc 1 8 Common specifications Exhaust port Rc 1 8 External pilot port M5 Stations Max. 8 units Refer to pages 13-2-8 to 13-2-18 for more
Painting and coating Warnings or specifications printed or labeled on the product should not be erased, removed or covered up. 12 to 14 Rc 1/4 22 to 24 Rc 3/8 Rc 1/2 28 to 30 Rc 3/4 36 to 38 Rc 1 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc. 6.
500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,
F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Note 1) 400 V type is provided with an earth leakage breaker (-B) as standard.
F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) HRSE Note) This is a manual fluid fill port that is different from the automatic fluid fill port.
Straight One-touch fitting 8 Female thread Rc, NPT, G 1/4 No display rotating function Display is upside down. S S OUT IN OUT IN IN IN Bottom With display rotating function One-touch fitting 8 Female thread Rc, NPT, G 1/4 OUT IN OUT IN S S IN 1 IN 1 Functions Bypass structure Sensor unit Protruding part (Refer to page 15 and 16 for details.)
isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!
3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc 1/2 (single system for channels 1,2) Power supply 3-phase 50/60Hz AC200/200 to 208V10% Rated flow*10 L/min 20 20 Max. operating current A 52 Main breaker size A 60 Temperature fuse operating temperature
Payload W (kg) 9-14-7 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size
Payload W (kg) 9-14-7 8 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size
300 Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MPa 200 200 0.3 MPa 0.3 MPa 100 100 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120
. *2Unit : MPa/ (degree Celsius) W Water-cooled refrigeration Piping thread type Power supply 20 3phase 200VAC(50Hz) Nill Rc 3phase 200 to 230VAC(60Hz) F G (Rc-G thread adapter set is included) 40 3phase 380 to 415VAC(50/60Hz) N NPT (Rc-NPT thread adapter set is included) 46 3phase 380 to 415VAC(50/60Hz) 3phase 460 to 480VAC(60Hz) Fig. 2-1 Product model number HRS090 Series 2.1Model number
R V Front flange type (F)/CG5FNS X165US inch rod option dimensional changes GA GB FT 2-Rc P H1 Width across flats B1 Dim.
port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size (Mounting side should be processed according to the dimensions below.)
For the wire (8)) for power regenerative converter (FR-RC-(H) (Mitsubishi Electric Corporation)), use the IV wire indicated in (1) (a) in this section.
Face seal fitting Compression fitting Female thread (Rc, NPT) Variations Model Orifice diameter Fitting/Port size (inch) Minimum operating pressure Pa(abs) Leakage Pam3/s Face seal fitting 2 3 4.5 6 1/4 3/8 Internal External XSA1 Compression fitting 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Model Orifice diameter Female thread (Rc, NPT) Minimum operating pressure Pa(abs) Leakage Pam3/s 2 3 4.5
Proper tightening torque N m Tightening torque for piping Connection threads Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 5. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port, etc. 13 Series VCA 2 Port Solenoid Valve for Fluid Control Precautions 3 Be sure to read before handling.
R threaded studs with Rc threaded ports and use NPT 1/4 0.118 (0.16) threaded studs with NPT threaded ports. 3/8 0.148 (0.2) 1/2 0.295 (0.4) Piping Caution 1. This product has One-touch fittings, refer to the Fittings & Tubing Precautions of Best Pneumatics No. 6. 2.