High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Industrial Filters

3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360 FGGLB FGGSC 200 300 320 340 320 370 FGGLC FGGSD 230 320 330 350 330 370 FGGLD Note 1) Indicates flow rate in L/min under atmospheric pressure (ANR) (at 0.5 MPa).

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ3143-M5 Cylinder is in extending.

CE2

to 650 Up to 1150 Up to 900 BT-04 BT-04 BT-08 BT-08 BT-06 63 CC 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-08M BD1-10M BD1-06M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05 BA-08 BA-10 BA-06 Foot style 2.37 3.61 5.63 9.33 13.08 -X

Brake mechanism added

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

1300 12-CY3R40 40 Rc1/4 NPT1/4 G1/4 12-CY3R50 12-CY3R63 50 63 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special order.

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

100

consumption 300 300 Air consumption 200 200 100 100 0 0 Supply pressure [MPa] Supply pressure [MPa] ZL6H (With valve) ZL6M (With valve) 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 800 800 Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum

NCA1

1 1/4 1-14 7 1/2 1 3 1/2 2 1/8 2 2 1/8 NCA1-CB1401 9.3 6 19/32 3.032 2 1/2 1 1/2 1 1/8-12 8 1/2 1 4 2 5/8 2 1/2 2 1/2 NCA1-CB1402 10.6 7 1/2 3.032 3 1 1/2 1 1/4-12 9 1/2 1 4 1/4 2 7/8 2 3/4 2 3/4 Note) Pivot Pin not included Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air Filter No.2 No.2 Mist Separator Series AM Cases that require air removed with moisture, dust or oil, though air is not dried Industrial machinery (metal seals of drivers) 1 mg/m3 (ANR) Series AM Auto Drain AD402 Humidity 100% 0.3 m Oil odor Mist

Series HAW Water Cooled Aftercooler 1

Outlet air temperature = 37 1.3 = 28.5C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution 1. Design the piping for coolant water and compressed air with a bore that is greater than the bore of the piping connections. 2.

HRX-OM-Z002

Ensure there is enough space for maintenance. 500 mm or more 300 mm or more 300 mm or 800 mm or more 800 mm or more more Fig. 3-5 Installation space HRLE Series 3.2Installation 3-7 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3 Installation Procedure 3.3.1 Installation procedure Install the product on a level, vibration-free floor.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

JXCx-OMT0023

Do not change this value by any means. 000h PC31 200 PC32 300 PC33 500 PC34 800 13 78 13. POSITIONING MODE No.

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

MLGC

stroke (mm) Bore size (mm) Model Data Slide bearing 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Auto Switch Mounting Bracket Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800

MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.