Series AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Max. flow capacity l/min (ANR)(SCFM) 1000 (35) 200 (7) 500 (17.5) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AZ1000

slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Code Connections (Inletq, Outletw) Bonnet option 01 02 06

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

High Precision Filter for Liquids FGH Series

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Element classification Note) Port size 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Drain Separator for Vacuum Series AMJ

NPT ZQ 06 3/4 10 1 ZF ZP Nil 2 6 J R Option/Combinations Combination available Combination not available Option ZCU Symbol Drain cock Nil AMJ Metal bow 2 Nylon bowl 6 Misc.

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread

VH

Body size (Base size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base Port size (Nominal size) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Piping/Mounting Piping Note) Mounting method Body Panel mounting Body Panel mounting Symbol 0 1 2 3 Side Side Bottom Bottom Thread type Nil N F Note) Only side piping is available for VH200 and VH600 and R port is located on the bottom.

VEX1

entry Port 1(P), 2(A) 3(R) 1 8 1 8 01 1 02 G Grommet (Lead wire length 300 mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal

air flow (l/min (ANR)) (1)Mass (g)Internal capacity (cm3) IN side, OUT sideMetric sizeZFB200-06?

Drain Separator for Vacuum Series AMJ

NPT ZQ 06 3/4 10 1 ZF ZP Nil 2 6 J R Option/Combinations Combination available Combination not available ZCU Option Symbol Drain cock Nil AMJ Metal bow 2 Nylon bowl Misc. 6 Drain guide J Flow: Right Left R Model Model AMJ5000 AMJ4000 AMJ3000 Recommended flow rate (l/min(ANR)) 500 300 200 Port size (Nominal size B) 3/4, 1 3/8, 1/2 1/4, 3/8 Weight (kg) 1.1 0.6 0.3 Specifications Fluid Air

Model Type: Standard, Piping: E (Compression Fitting Type), Tank Size: None, Port Size: 06 [3/4 (20A)], Thread Type: N (NPT), OUT Port Piping: None, Rated Voltage: 2 (200 VAC), Electrical Entry: WN (M12 Connector, w/Surge Voltage Supproessor, All Voltages), Fluid and Ambient Temp.: B (-40 to 60°C)

Size: 200 (1/8 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6)

Size: 200 (1/8 Standard), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)

Size: 200 (1/8 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)

Body Size/Type: 200 (In-line Type 1/8 Standard), Control Type: None, 1: , Thread Type: (R Thread or In-Line Type), Port Size: In-Line Type, Applicable Tubing O.D: 06 (ø6)

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, IP65 (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, VALVE, BODY PORTED (DC), VALVE,