SMC Corporation of America
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Pilot pressure range Ambient and fluid temperature (C) 0 (No freezing) to 60 Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) Mounting orientation Free 150/50 Impact/Vibration resistance (m/s2) Note) VPA3165-06 VPA3145-03 VPA3165-06 VPA3145-03 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one

Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation

ITV0090-3MS2 sets (Vacuum regulator part no. (1, 2 stations)) ITV0090-3ML1 set (Vacuum regulator part no. (3 stations)) 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RO printing RO 8150SZ Printed in Japan. D-DN

Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.

SMC Corporation of America SMC Corporation Akihabara UDX15F , 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard, Noblesville, Indiana, 46060, U.S.A.

This is a legacy product, and replaced byZH18DSA-03-03-03, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, EC, ZH NOZZLE SIZE 1.8, .24402 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH18D?12/Rc 3 8?12/Rc 3 8?12/Rc 3 8

This is a legacy product, and replaced byZH18DLA-03-03-03, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, EC, ZH NOZZLE SIZE 1.8, .22010 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH18D?12/Rc 3 8?12/Rc 3 8?12/Rc 3 8

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8), Accessories: N (w/o Bracket, w/o Silencer)

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

How to Order AFF D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

How to Order AM D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

How to Order AMD D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

How to Order D AMK 30 F 03 B Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Options Nil Without mounting option a Mounting B With bracket Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl b Bowl Semi-standard C With bowl guard 6C With bowl guard (Nylon bowl) Nil Flow direction: left to right c Flow direction R Flow direction: Right to

How to Order 30 03 B AFD D Symbol Description Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 06 3/4 Nil Without mounting option a Mounting B With bracket Option Nil Without auto drain b Float type auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O.

How to Order 30 M BE 02 03 K AR D Common supply Symbol Description Body size 20 30 40 Nil With backflow function Without backflow function With backflow function Nil c Thread type 01 Port size (IN) 02 03 04 01 Port size (OUT) 02 Note 1) 03 Nil Without mounting option B With bracket a Mounting H With set nut (for panel mount) Nil Without pressure gauge Note 2) Note 2) Square embedded type

How to Order VHS 30 03 D Semi-standard: Select one each for a to b. Semi-standard symbol: When more than one specifications is required, indicate in alphanumeric order.