NCQ2/CQ2

22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 U 21.5 22.5 25.5 28 36 38 43.5 48.5 57 65.5 12 16 20 25 32 40 50 63 80 100

Electric Actuator/Slider Type

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

V100

For R and U, DC voltage is only available.

High Vacuum Angle Valve

U type: DC only.

7

C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5) U 168 (176

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

I

T P U T F U N C T I O N Courtesy of Steven Engineering, Inc. !

Fieldbus System

Version Nil Version Nil EX600-DXlB EX600-DXlCl EX600-DXlD EX600-DXlE u EX600-DXlF u Digital Input Unit Digital Output Unit EX600-DYlB EX600-DYlE u EX600-DYlF u Product number Digital Input/Output Unit EX600-DMlE u EX600-DMlF u Analog Input Unit EX600-AXA Analog Output Unit EX600-AYA u Analog Input/Output Unit EX600-AMB u Handheld Terminal EX600-HT1-l u EX600-HT1A-l Product number Handheld

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Table of Contents

u u Drain Drain Drain Component Parts Material No.

Plug-in/Plug Lead: Single Unit

Note 3) 2-6-23 Base Mounted Series VQ5000 Kit (Lead wire cable) L 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R2 5 R1 3 1 P 2-G1 (Electrical entry) SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port Cable length L 0: 600 mm L 1: 1500 mm L 2: 3000 mm U D U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

45

side 2 to 10 stations D U D side U side Stations 3 2 1 B 2 to 20 stations Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

Compact Cylinder

Applicable Cylinder Series: CDQ2, CDQ2W (Large bore size) (mm) Auto switch model D-A7lH/A80H D-F7l/J79 D-F7lW/J79W D-F7BAL D-F79F/F7NTL D-M9lV D-M9lWV D-M9lAVL D-F7lV D-F7lWV D-F7BAVL D-A7l D-A80 D-A73C D-A80C D-A9lV D-J79C D-A79W U 79 86 95 U 82.5 89.5 98.5 U 81 88 97 U 76.5 83.5 92.5 U 67.5 74.5 83.5 103.5 110.5 U Bore size U 75.5 82.5 91.5 U 78 85 94 125 140 160 180 200 69.5

Modular F.R.L. Units

industries u u Alcohol Ethyl alcohol IPA Methyl alcohol Antifreeze Adhesives u Oil Gasoline Kerosene u Ester Phthalic acid dimethyl Phthalic acid diethyl Acetic acid Synthetic oil Anti-rust additives u Ether Methyl ether Ethyl ether Brake oil additives u Amino Methyl amino Cutting oil Brake oil additives Rubber accelerator u u Others Thread-lock fluid Seawater Leak tester u : Essentially

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

0.4

VVQ2000-3A-1<U-Side End Plate Assembly> y U-side end plate assembly no.