Vacuum System Peripherals:

24 e Valve Model Fill in the blanks below with symbols of necessary specifications.

5 Port Solenoid Valve

VQC 4/5 VQC 4/5 VQZ SQ VFS + 24 V + 24 V VFR Power supply for output Power supply for output 0 V 0 V VQ7 Power supply for control/input Power supply for control/input + 24 V 24 V 4. Do not install in places where it can be used as a foothold. Applying any excessive load such as stepping on the product by mistake or placing a foot on it, will cause it to break. 5.

New

Electrical option Piping option Port thread Special voltage Electrical entry/Electrical option Symbol Port thread Specifications Symbol Electrical entry 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC

Digital Flow Switch (Integrated display type)

Display Display part 5 digits, 7-segments, Colour display: Red Indicator LED (output) LED is ON when output is ON Supply voltage 24 VDC 10% Power consumption (no load) 150 mA or less Enclosure IP65 Operating temperature range Operation: 0 to 50 C, Storage: -25 to 85 C (no freezing or condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H.

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Compact

24 2 x 3.4 (Through holes for mounting) 54.9 (2.5) 2 x M5 x 0.8 (Pilot port) 16.75 42.3 + Stroke 44 + Stroke 39.3 32.2 + Stroke 4.5 9.5 16.75 2.5 33.5 22.2 + Stroke 21.4 33.5 (57.4) 4 x M3 x 0.5 depth 2.5 24 8 +0.1 10 0 depth 2.5 Auto switch 24 MXZ25R(Pilot port location: Right) MXZ25L(Pilot port location: Left) 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) 22.2 + Stroke 22.2 + Stroke

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

Intrinsically Safe Valve

fluid temperature 2-position single, double 4-position dual 3 port valve 5 Max. operating frequency (Hz) 3-position 3 Non-locking push type, Push-turn locking slotted type, Push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Main/Pilot valve common exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 150

One-touch Fittings

P.150 Male run tee KQ2Y Use to branch a female thread in the same direction and at a 90 angle.

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

Nil 6 50, 100, 150, 200 1 pc.

Air Slide Table Series MXS

end Shock absorber 10 20 30 40 50 75 100 125 150 Extension end Retraction end MXS6 (L) MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) 10 5 30 13+0.15S 180 155 115 100 80 -X 15 35 9 45 40 40 26+0.17S 410 285 235 190 160 150 30 50 20 60 80 90 43+0.21S 890 660 480 385 325 325 325 Individual -X 50 80 30 105 120 160 55+0.21S 1700 1370 1090 760 640 580 570 570 100 170 71 205 140 310 150

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Power Clamp Cylinder

Space at manual release Leave a space in order to release by hitting with a plastic hammer. 150 Min.

High performance type Step Motor Controller (Servo/24 VDC)

PWR: Power supply plug 23 5.1 Power supply plug specifications 23 5.2 Electric wire specifications 23 5.3 Wiring of power supply plug 24 (1) Wiring of the power supply (C24V, M24V, 0V) 24 (2) Wiring of the stop switch (EMG) 24 (3) Wiring of the lock release (LK RLS) 24 5.4 Stop circuits 25 (1) Example circuit 1 Single controller with teaching Box 25 (2) Example circuit 2 multiple controllers

SFOD-OMT0010

(4) Test drive starts . 24 4.

Step Motor Controller (Servo / 24 VDC)

should be made between the 24 VDC controller power supply and the M24V and EMG terminal of the power supply plug.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Motors can be installed close to each other 24 - 4. External Wiring Diagram Examples of standard wiring are shown for each connector of the controller. 4.1 PWR: Power connector Controller Controller power supply 24 VDC Power cable PWR (The 24 VDC power supply and the power cable should be obtained separately.) Please refer to "5.