Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: CN (Plug w/o Lead Wire))

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: L (Grommet Lead Wire 3m)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: CL (Connector Style Lead Wire Length 3.0m)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: C (Connector Style Lead Wire Length 0.6m)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: CN (w/o Connector)

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Lubricator Series AL10 to 60

for bowl in imperial units (PSI, F) Symbol 1 10 11 2 3 6 8 C R 3W Z Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size F.R.L. 10 20 30 40 50 60 AV Thread type Metric thread (M5) Rc NPT G AU Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01

Rotary Actuator/Vane Style Series CRB1

(When double solenoid is mounted) Solenoid B Solenoid A C2 (When double solenoid is mounted) B3 (When the needle is fully open) B2 2 x metering valve with silencer (EXH) ASN2-M5 (CVRB1BW50) ASN2-01 (CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is for VZ 140-1G.

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB)

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: (None), Exhaust Check Valve: K (AKH06-00, for 6mm tubing)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: (None), Exhaust Check Valve: K (AKH06-00, for 6mm tubing)

AC Servo Motor Driver (CC-Link Type)

The smallest unit for actuator movement is 1[m] (0.001[mm]). -55- 5.7.4 Point table (Servo Motor Speed) Configuration Rotation speed configuration: *r/min (rpm): motor command rotation speed (motor rotations/min) Travel speed (mm/s) must be converted into rotation speed (r/min). See below for the conversion formula.

JXCx-OMU0024

Turn OFF and ON the control and motor power supplies Position error overflowed (196) E 55 - Name of the controller How to Group alarm Descriptions and countermeasures setting reset the software (code) < Details > An error of the EEPROM has occurred. Please contact SMC.

I

Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.

Modular Type Lubricator Series AL

: 6 x 4 nylon tubing Name plate and caution plate for bowl in imperial units (PSI, F) Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01

Body Size: 20, Thread: N (NPT), Port: 01 (1/8), Option: Standard, Attachment: Standard, Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40, 50, 55, 60), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Clean Air Module

in 24 variations Available in 24 variations Digital flow switch Regulator Regulator + Pressure outlet port ON/OFF valve Restrictor Filter Regulator + Filter Digital flow switch + Regulator + ON/OFF valve + Filter Regulator + ON/OFF valve + Restrictor + Filter LLB4 Flow range: 50 to 500 L/min (ANR) LLB3 Flow range: 5 to 100 L/min (ANR) Related Equipment Pressure gauge for clean room G46-4-01

0.5

Power supply cable IZS41 IZF CP HS Automatic cleaning unit 21 Power supply cable Nil Power supply cable (3 m) Z Power supply cable (10 m) Model 21 For IZF21 31 For IZF31 X13 02 IZS41 CP Power supply cable length Cleaning arm (for automatic cleaning unit) 01 Total length: 1 m 02 Total length: 2 m IZF M3 21 Model 19 Total length: 19 m 20 Total length: 20 m 21 For IZF21 31 For IZF31 : Available

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.