Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 74 lb

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

1

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P V V V v v Grommet Solid state auto switch 2-wire 12 V M9BV M9B V V V v v Connector H7C

2

Example) IS10M-30-6LP Symbol Description Nq Body size 20 30 40 50 a Set pressure range Nil 0.1 to 0.4 MPa V V V V 6 Note 1) 0.1 to 0.6 MPa V V V V + Semi-standard Nil 0.5 m V V V V L 3 m V V V V Z 5 m V V V V + b Lead wire length Nw 23 15 (13) c Pressure unit of the scale plate Nil MPa V V V V P Note 2) MPa/psi dual scale V V V V (23) (5000) (3000) (500) Note 1) Set pressure range of 6P (

Air Slide Table

m [kg] V = 50 1.5 V = 100 V = 150 1.0 V = 200 0.5 0.0 0 20 40 60 80 100 120 140 Allowable overhang L [mm] MXQ16(A)-10, 20, 30Z MXQ16(A)-40, 50Z 4.5 4.5 V = mm/s V = mm/s 4.0 4.0 3.5 3.5 Load mass m [kg] Load mass m [kg] V = 50 V = 50 3.0 3.0 V = 100 V = 100 2.5 2.5 V = 150 V = 150 2.0 2.0 1.5 1.5 V = 200 V = 200 1.0 1.0 0.5 0.5 0.0 0.0 0 10 20 30 40 50 60 70 80 90 0 10 20 30 40 50 70 60 Allowable

CATALOG

T h e y offer particular strengths for different requirements but h a v e a c o m m o n a l i t y o f m a j o r f e a t u r e s a n d b e n e f i t s a c r o s s t h e r a n g e t o g i v e y o u m a x i m u m v e r s a t i l i t y, p e r f o r m a n c e a n d r e l i a b i l i t y i n y o u r q u e s t f o r c o m p e t i t i v e advantage.

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Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are

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receipt of order. 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are other

Battery-less

LEFS v v E339743 v v v v 11-LEFS v v E339743 v v v v 25A-LEFS v v E339743 v v v v LEFB v v E339743 v v v v LEJS v v E339743 v v v v 11-LEJS v v E339743 v v v v 25A-LEJS v v E339743 v v v v LEJB v v E339743 v v v v LEY25/32/63 v v E339743 v v v v LEY100 v LEYG v v E339743 v v v v LESYH v v AC servo motor Compatible

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

One-touch Fittings

P.103 Dimensions P.105 Made to Order/Clean Series/ Spare Parts P.131 M R Rc UNF NPT Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni P.101 Metric 2 3.2 4 6 8 10 12 16 V V V V V V V V How to Order P.134 Variations P.135 Dimensions P.137 Made to Order/Clean Series/ Spare Parts P.156 Sealant/Gasket

Compact Hydraulic Cylinder

A80C A79W A96 A72H A93 A90 Relay PLC 3-wire (NPN equiv.) 5 V 12 V 5 V, 12 V 12 V 5 V, 12 V 200 V 100 V Grommet IC circuit 100 V or less 2-wire 24 V Connector Grommet IC circuit 24 V or less Diagnostic indication (2-color display) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Since there are

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Lead wire length symbols: 0.5 m Nil(Example) Y59B 3 m L (Example) Y59BL 5 m Z (Example) Y59BZ Z76 5 V IC circuit Reed switch Solid state switch Yes 100 V Z73 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less No 5 V, 12 V Z80 IC circuit Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7P 3-wire (PNP) Y59B 2-wire 12 V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Y7NW Diagnostic indication (2-color

Modular Design with Uniform Body Style

MPa V V V V V 6*1 0.1 to 0.6 MPa v v v v v + Port size IN OUT OUT q e Semi-standard Nil 0.5 m V V V V V b Lead wire length r L 3 m V V V V V Z 5 m V V V V V + c Pressure unit of the scale plate Nil MPa V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

5-Port Solenoid Valve

SS5Y5-10 11 SS5Y7-(M)10 11 Mounting and Option Symbol Mounting option Printing DIN rail Direct mounting Yes No With Without Specified length AA V V A V V A0 V V A3 V For 3 stations A24 V For 24 stations BA V V B V V B0 V V B3 V For 3 stations B24 V For 24 stations Ordering Example SS5Y3-10F1-05UR-C6AA 1 set *SY3200R-5U1 5 sets * Name plates cannot be mounted onto Type

NCQ2/CQ2

(Example) CDQ2L40-200DCZ Long Stroke Load voltage Lead wire length (m) Auto switch model Indicator light 0.5 (Nil) 3 (L) 5 (Z) None (N) Applicable load Pre-wired connector 1 (M) Type Special function Wiring (Output) Electrical entry DC AC Perpendicular In-line M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 5 V, 12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3

ISO Cylinder

Single acting, Spring extend V V Mounting bracket*1 Applicable mounting bracket Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N E V V V V V F V V V V Y V V V V Single acting, Spring return Single acting, Spring extend E V V V V V F V V V V *1 Refer to Mounting Brackets/Accessories on page 72 for details of mounting brackets

Compact Cylinder

Auto switch model Load voltage Lead wire length (m) Indicator light None (N) Applicable load Pre-wired connector 1 (M) Type Special function Electrical entry Wiring (Output) 0.5 3 (L) 5 (Z) DC AC Perpendicular In-line (Nil) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 5 V, 12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V IC circuit 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire