SMC Corporation of America
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m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5

distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-52 MGPS50/80 (5) l = 50 mm, V = 200 mm/s (6) l = 100 mm, V = 200 mm/s 100 80 50 80 80 80 40 Load weight m (kg) 30 50

Cushion adjustment screw V T GA 4 x J GB Air release CHQ Width across flats G CDH9 CHK MM R (max.) d CHN W D E W CHM CHS a MA CH2 CX 0.3 F NA NB U A K C L 0 0.3 S + Stroke H CHA CHA B Z + Stroke RR Related Products ZZ + Stroke DWith rod boot e 10 l f h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A B C CDH9 a CX D E F d G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

M N O P Q J K L M N O P Q Part no.

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

3 0.4 0.1 Port size 4 0.2 0.05 Series 200 p p Port size Symbol 300 p p Note 1) Indicates the maximum operating pressure differential of pressure ports 2 and 3.

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula: L1=31n+29, L2=31n+14 n: Stations Station L dimension 2 3 4 5 6 7 8 L1 91 122 153 184 215 246 277 L2 76 107 138 169 200 231 262 1735

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

AXT100-DS25015 030 050 L Terminal no.

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] P : Pressure difference [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 34 Solenoid

10A-1 VVQ2000-10A-1 Dual flow fitting assembly VVQ1000-52A-C8 VVQ2000-52A-C10 Perfect block VVQ1000-FPGVVQ2000-FPGCYL to port Conforms to IP40 Individual SUP spacer VVQ1000-P-1-C6 VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S

N.C. valve Q E (P) R Sensor (breathing) port Rc 1/8 (NPT 1/8) LQ3 integral fitting 1/8 ( 3, 4) Pilot port Rc 1/8 (NPT 1/8) Pilot port F K A B A B J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQm0-Zmm Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-Zmm LVQ30-Zmm LVQ40-Zmm LVQ50-Zmm LVQ60-Zmm 25.5 46 31.5 58 33.6 56.5 12 75 21.8 37 5 7 15 53.5 21