High Vacuum L Type Valve

: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.33 0.52 1.2 1.8 3.2 5.2 Note 1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

VZ3000

M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6 3 position exhaust center 3(R) port PE port Note) 1(P), 5(R1), 3(R2) port: M5 x 0.8 4 Rated voltage Manual override 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil: Non-locking push type C: Locking type C (Manual) 3 position pressure center 4 5 24 VDC 12 VDC B: Locking type B (Slotted) 5 6 9 Other

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

Rotary Table

I is converted to the rotation of the shaft (A). r B 2 r I = m2 2 b a I I = A B Number of teethb 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -36- Kinetic energy Table 13 shows the allowable kinetic energy of the rotary table. The end angle speed is obtained by: Table 13.

AKH/AKB Series

Inch Size R, NPT> Applicable tube O.D.

Basic Type/Direct Mount Type

7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

HY C M A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 16 D-X Individual -X Technical data Series CJ5-S Dimensions Rod side flange style (F): CJ5FS R V 0 0.3 0 0.3 CA BA BB Rod cover side GB Piping port 2 x M5 x 0.8 GA NN MM Piping port M5 x 0.8 Cover surface 0 0.3 BA CB D FY FB With head cover port in axial location (R) 2 x FC Mounting hole FX FZ NA F FT 0 0.3 BB

High Vacuum L Type Valve

: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34 0.54 1.3 1.9 3.3 5.8 Note 1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

Title not found

type F lsed keep the dhaust port ' o r r o r r q n o f F c r . o _ d ' * _ s " e ' o r o ' e r q d r Nole 1) Dolbe wrng specl caton Singe, doibe a.d 3 posilion soenoid E@s can be lsed on a manrfodslatons Useolasrnqsolenodlvi sutrn an unused onlrolsignal li th$ rs notdesred orderwrlh aspecilied layout No1e2)speciedlayoul: ndlelvnn9specf catonsonamanlold sp6ifilio. sh@t (No1e thal doube and

VDW

Model C [dm3/(sbar)] Av x 106(m2) Cv converted b Cv N.C. 0.04 0.40 0.14 0.96 1 0.04 VDW10 M5 0.07 0.25 0.30 1.7 1.6 0.07 0.09 0.45 0.31 1.9 1.6 0.08 M5 1/8 (6A) VDW20 0.18 0.45 0.58 4.3 2.3 0.18 0.33 0.38 1.2 7.2 3.2 0.30 0.16 0.52 0.52 3.8 2 0.16 1/8 (6A) 1/4 (8A) VDW30 0.30 0.52 1.0 6.7 3 0.28 0.46 0.49 1.5 11 4 0.44 17-2-65 6 Series VDW10/20/30 Construction VDW11 VDW21 i i w w e e r r

Floating Joint

JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9

AKH/AKB Series Check Valve with One-touch Fitting

Inch Size R, NPT> Applicable tube O.D.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

Lubrication Equipment

1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

Modular Type Regulator Series AR

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

CHKD/CHKG

Body mounting bolt tightening torques Tightening torque (Nm) 2.5 4 7 16 30 40 70 100 Bore size (mm) Mounting bolt size M5 M5 M6 M8 M10 M12 M14 M16 20 25 32 40 50 63 80 100 Magnetic body (steel plate, etc.) 268 JIS Standard Compact Hydraulic Cylinder: 10 MPa CHKD Series Construction r !0 !1 q y !3 o i !4 !

modular-press-e

-MLA ISE35-N-65-M PNP output/Wiring top entry ISE35-R-65-MLA ISE35-R-65-M N.O.