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be soefod only afd reqLr res lhe B type manlal overtide Cannot combine lritl' H or'Y' oplions connector w lh 300mrn lead wire M vvsoz+ i T m"*.r,r*l I Eslle.r{lrq anifold Number of stations. J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i .

ZSE2/ISE2

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Option 1: w/o Lead Wire, Option 2: Bracket A, Vertical Mounting, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Option 1: w/o Lead Wire, Option 2: Bracket A, Vertical Mounting, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Option 1: w/o Lead Wire, Option 2: Bracket A, Vertical Mounting, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Option 1: w/o Lead Wire, Option 2: Bracket A, Vertical Mounting, Option 3: -

PFxx-OMJ0005CN

[L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

REA/REB

(Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

REA/REB

(Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.