MXS Series Air Slide Table

9.5 31 16 46.8 12 -M4 X 15 20.5 10 15 M4 X 15 MXS16 MXS-BS16 RB1007 11 37 19 53.7 14 -M5 X 18 23 12 18.5 M5 X 18 MXS20 MXS-BS20 RB1411 13 47 26 78.3 19 12 M6 X 25 27 13 25.5 M6 X 25 MXS25 MXS-BS25 RB1412 16 53.5 26.5 79.3 19 12 M8 X 25 33 17 25.5 M8 X 25 Mounted to body MXS-BS 8, 12, 16 C A MXS-BS 20, 25 P A C B P B WIDTH ACROSS FLATS E D Mounted to table WIDTH ACROSS FLATS F D WIDTH ACROSS

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

3 Port Solenoid Valve SYJ300/500/700 Series

Manifold Specifications For internal pilot Type 20 Type 41,S41 Type 42,S42 Type For external pilot Type 20R Type 42R,S42R Single base type /B mount Manifold type Common SUP, Common EXH P(SUP), R(EXH) type 2 to 20 stations Valve stations Valve Base Location A port specifications Top Side Direction M5 0.8 1/8 NPTF M5 0.8 1/8 NPTF P,R port M5 0.8 Port size M3 0.5 A port M3 0.5 N3T (5/32" one-touch

VP300/500/700

(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire

3 Port Solenoid Valve Metal Seal Series VZ200 1

Ported/Base Mounted Series VZ400 Dimensions: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking)

VHK

(mm) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Table of Contents

IN OUT 9 24 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for

3 Port Solenoid Valve Series VQ100 1

16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8

3 Port Solenoid Valve Series VQ100

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

3 Port Solenoid Valve Series VQ100 1

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

48

Plug Part Number Bore size Part number Port thread type Quantity1 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 *1 1 set includes 8 pieces.

e

P Cable length is selectable from 1 m, 3 m and 5 m. P Improvement in the maximum operating temperature from 40C to 50C (Actuator unit only) P Mounting method can be selected among 3 types.

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M5 x 0.8 3.0 8 LEYG32M L M6 x 1.0 5.2 10 25ALEC LEC S LEC SS-T LEC Y LEC Y 3.

MRHQ

three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34 Side A Side B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800