1

View D-D Auto Switch Mounting Position Auto Switch Mounting Height D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A7H/J79W D-A80H/F7BAL D-F7/F79F D-J79/F7NTL D-F7W D-A7/A8 D-F7V D-J79C D-A79W D-A73C D-A80C D-F7WV D-A73 D-A80 D-F79F Bore size (mm) Bore size (mm) D-F7NTL D-A79W A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 20 40.5 39.5 40 39 37.5 36.5 44.5 43.5 45.5 44.5 26.5 26.5 32.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor Built-in One-touch fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C4: MAX

Table of Contents

single (Reverse pressure): VQ7-8-YZ-D-SC 3 position closed center : VQ7-8-FHG-D-SC exhaust center : VQ7-8-FJG-D-SC pressure center: VQ7-8-FIG-D-SC 175.5 180.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38 50 B A Cable with connector Cable

ZP

Hexagon width across flats 12 Hexagon width across flats G 1 8 Model A 1 8 B C F: M5 x 0.8 F: M6 x 1 F: Rc K L Y E B C F: M6 x 1 F: M8 x 1.25 F: Rc K L Y D Model A E D G E D G E D G D D ZPT40B ZPT50B 34 6 8 6.2 38 5.5 5.5 13.8 10 13 12 15 5 8 16 25 25 31 40 50 43 53 51.5 47.5 32.4 19 24.4 16 48 57 ZPT10B 29 6 8 29 6.2 12 35 8.7 7.5 9.9 8.5 18.5 27.5 27.5 33.5 19 ZPT13B 16 18 20 ZPT16B 21

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

36 (45) (37) (4.9) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) (36.7) (40.2) 12.7 20.5 40.4 15 0.8 (20) 28.1 [35.1] + 1.6 (For manifold gasket positioning) 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector (L): M plug connector (M): DIN terminal (D, Y): M8 connector (WO): 10-SY5 20-L(-F2) 3 4 5 10-SY5 20-M(-F2) 3 4 5 10-SY5 20(-F2) 3 4 5 10-SY5 20-WO(-F2) 3 4 5

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

MY1

MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 74 94 B 86 106 Operating range l Note) 8.5 (6.5) 6.5 (7) Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

SQ1000/2000

Refer to the dimensions drawing of each kit for dimension L. L 1.25 P = 12.5 5.25 7.5 35 25 5.5 Dimension L L = 12.5 x n + 10.5 No. Dimension L 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. Dimension L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No.

F

to BS5409 part 1 P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCT KCJ KCE KCL KCL P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Air Slide Table

30 40 0.0 0 10 20 50 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-10, 20Z MXQ8( )-40Z A C A C 1.2 1.2 V = mm/s V = mm/s 1.0 1.0 Load mass m [kg] Load mass m [kg] 0.8 0.8 V = 50 V = 150 V = 150 V = 50 0.6 0.6 V = 100 V = 100 V = 200 V = 200 0.4 0.4 0.2 0.2 0.0 0.0 0 10 20 30 40 0 10 20 30 40 50 60 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-50Z A C 1.2

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): 10-SYJ7143-M01 02 DIN Terminal (D): 10-SYJ7143-D01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX.10 57.5[64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) 68.6[75.6] Approx. 300 20 20 20 20 Pg7 95.1[97.3

MGP

40 5 32 1 32 1 10 50 100 200 0.2 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 7 Series MGP Compact Guide Cylinder Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20 Load weight m (kg) Load weight m (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.