SMC Corporation of America
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14 120 52 113 82 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 154 Pilot Operated 2 Port Solenoid Valve VXD Series High temperature oil Heated water Replacement Parts DIN Connector Part No.

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 8 for Precautions on every series. Caution on Design Mounting Caution Caution 1. Install with out port down in a vertical position. Inclination from the vertical line should be less than 5. 2.

(Tightening torque: 0.7 to 0.8 Nm) (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws.

IODD file 14 Data Storage 14 Parameter data 14 Output number layout / Process data 23 Input number layout / Process data 26 Troubleshooting and Maintenance 27 Specification 32 Specifications 32 Dimensions 34 -1No.EX-OMW0016-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(Tightening torque: 0.7 to 0.8 Nm) (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws.

M12-anchor bolts (4 pcs.) are required. (27.2[inch]) 692 Anchor bolt (4-14) Anti-seismic bracket (optional) Top Anti-seismic bracket (optional) Anchor bolt (4-14) Top Front Figure 8-9 Anchor Bolt Mounting Position HRW Series 8.6 Anchor Bolt Mounting Position 8-13 HRX-OM-K003 Chapter 8 Appendix 8.7 Compliance This system conforms to the following standards.

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

2 5.7 7 6 12.5 4 8.5 18.6 14 1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

5.9 11 11 14 19 E M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Groove for auto switch mounting M2.5 x 0.45 4 1.3 12 26 4 15

Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 Standard stroke 4 6 10 14 11 14 18 22 2.4-2 High Precision and Rigidity. High Precision and Rigidity. Environmental Conditions. Environmental Conditions.

Hs A B (mm) Proper Auto Switch Mounting Position D-A72/A7H/A80H D-A73C/A80C/F7 D-J79/F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL/F7BAVL Auto switch model D-A73 D-A80 D-F7NTL D-A79W D-P4DWL A A 9.5 13.5 11.5 14 18 21.5 B B 6.5 9 12 15 18.5 24.5 A 14.5 18.5 16.5 15 19 22.5 B 11.5 14 17 16 19.5 25.5 A 6.5 10.5 12 11 15 18.5 B 3.5 6 8.5 12 15.5 21.5 A 9 7 9.5 13.5 17 B 4.5 7.5 10.5 14 20 Bore size

E J J 16 22 A A (C) C (C) C 14 2 x H 2 x H Port size Port size 2 x 5.3 2 x 5.3 Mounting hole Mounting hole Width across flats 27 Width across flats 27 14 34 14 34 2 x 5.5 Mounting hole 42 42 B B DIN terminal: D Conduit terminal: T 23 23 (E) G1/2 Cable 6 to 12 K I F I F 34 K D 32 J Width across flats G Width across flats G (E) 14 25 31.5 (44) E E 14 J (L) A (C) C A 2 x H Port size E (E) G1

Basic style 7 35.5 4.5 2 x cushion needle 33 Width across flats 5 4 2.5 Rod cross section 4.5 3.5 2 x M5 x 0.8 (Port size) 9.5 4 x M4 x 0.7, effective length 7 3.3H7 +0.012 0 14 10 3.5 13 4 x 3.5 through 2 x 4 x 6.5, counterbore depth 3.5 (Opposite side also) 6h7 0 -0.012 28 27 20 20 39.5 18 17 77.5 + Stroke 15 M3 x 0.5 92.5 + Stroke 4 x M4 x 0.7, effective length 6 10 19 14 Rod end male

14 1.4 2.2 M4 x 0.7 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 D-X 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 Individual -X 2.7 M8 x 1 12 4 15 11 40 36 2.8 9 26 14 M12 x 1.25 17 6 20 13 49 41 3.4 12.4 33 27 1429 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the auto switch in the switch mounting groove on the escapement from the direction as below figure.