High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

CLQ

Mounting 20, 25 32 to 100 B A L F G D Through hole (standard) Double end tapped Foot type Front flange type Rear flange type Double clevis type Through hole/Double end tapped common (standard) Foot type Front flange type Rear flange type Double clevis type B Auto switch type L F G D Nil Without auto switch (built-in magnet cylinder) Select auto switch models from the table below.

CG5-S

F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 3 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog output

VQ5000

Note 3) Available only with F , L and T1 kits. Note 4) Specify the wiring specifications on the manifold specification sheet. (Except L kit) . . . . . . Minimum number of stations depends on the kit. (Refer to the table below.)

Air Slide Table/Long Stroke Type Series MXY

Table Deflection (Reference Values) Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension mm L dimension mm MXY6 MXY6 MXY6 100 100 100 MXY8 MXY8 MXY8 100

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F K (Filter standard installation) Pilot port Pilot EXH port Q: Female thread for mounting bracket 4 threads on each side. 8 threads in total. 12 PE E Bracket Main port R J D 1 2 O I N M C B A P: For mounting 4 locations H G Air Operated Type A B C D E F G H I J K L M N O Model SGHA12-7010 SGHA22-7015 SGHA321-7020 SGHA322-7020 SGHA421-7025 SGHA422-7025 Main port Pilot port 2 x 3/8 1/8 60

CJ5-S

Mounting style B L F D Basic style Axial foot style Rod side flange style Double clevis style CJ5 L 16 S R 60 Without auto switch CDJ5 L 16 S R 60 H7BAL With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.

CJ5-S

m L Part no.

PSxx-OMU0008CN

kPa ISE20CH1.000 MPa ONOFF ISE20C0.050 MPa ZSE20C5.1 kPa ZSE20CF5.0 kPa ISE20CH0.100 MPa 1.5 ms OUT1 ON OUT1 OFF -30No.PS-OMU0008CN-D [F 2] OUT2 36 [F 1] OUT1 [F 3] 38 0 ms [F 4] 39 [F 5] FUNC 41 [F 6] 43 0% [F10] 44 std() [F11] 50 1000 [F80] 51 OFF [F81] 52 OFF [F82] 54 A [F90] 55 OFF [F96] 57 [F97] 58 OFF [F98] 60 () [F99] 62 OFF XY "---" -31No.PS-OMU0008CN-D [F 0]

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Vertical upward: Lifter Vertical downward: Press Horizontal: Chucking l l m m F m F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) Up to 300 Up to 500 Up to 700 Up to 300 Up to 500 Up to 100 Up to 200 Up to 300 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) l: This dimension indicates the position of the load center of gravity

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Vertical upward: Lifter Vertical downward: Press Horizontal: Chucking l l m m F m Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

ML2B

B 75 84 105 C D E F G H J Part no.

ML2B

84 105 C D E F G H J Part no.

ML2B

MVGQ Head cover WL Head cover WR L F CC K E 3. Ejection from jumping at beginning of extend or retract stroke may cause temporarily high speeds exceeding the response speed counting speed in the counter or position detection sensor. This can be a cause of malfunction.

Speed Controller with One-touch Fitting

Speed Controller with One-touch Fitting AS Series Push-lock Type RoHS AS-F AS-F Elbow Brass Stainless steel Universal Reduces labor time!

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

block mounting position D side U side Kit F Kit F 1 to 18 stations IP65 compatible TD TO Terminal block box 3 to 18 stations Indicator light Manual override L S kit (Lead wire cable) kit (Serial transmission unit) External pilot supply port The valve is equipped with a lamp/surge suppressor, and the voltage is 24 VDC.