Round Type Hydraulic Cylinder

D-C7/C80 D-H7/H7W/H7F/H7BA 8.5 Hs Hs 8.5 16 16 B Auto switch 29 A 26 A Auto switch B D-C73C/C80C D-H7C Hs 8.5 Hs Auto switch 16 16 B Auto switch 38.2 A A 36.7 B D-G5/K59/G5W/K59W/G5BA/G59F/G5NT D-B5/B64/B59W Hs Hs 12 Auto switch 12 24.5 24.5 A B A B Auto switch 33 6.5 33 D-A3/G39/K39 D-A4 Hs Auto switch 36 Hs 36 Auto switch B A B A 49 49.5 G 1/2 (applicable cable 6.8 to 11.5) G 1/2 (applicable

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

Compact Cylinder

Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with

3 Position Cylinder Series RZQ

A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs MLU MLGP A B ML1C Proper Auto Switch Mounting Position (mm) Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL Hs D-A72/A7H D-A80H/A73C D-A80C/F7 D-F7V/F79F D-J79/J79C D-F7W/F7WV D-J79W/F7BAL D-F7BAVL Auto switch type Auto switch type D-F7V D-F7WV D-F7BAVL D-A73 D-A80 D-A7 D-A80 D-A73C D-A80C D-A79W D-F7NTL D-J79C D-A79W Bore size Bore size A Hs

Series VQ Metal Seal/Rubber Seal Body Ported

Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included

Rotary Table/Vane Style Series MSU

9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 D-R73, D-T79 D-R80, D-S79, S7P 180 D20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane 90 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 149 Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13

Compact Cylinder with Air Cushion Series RQ

Hs A B A B 32 to 50 D-A73C D-A80C D-J79C D-A79W D-F7W D-F7V Approx. Hs Approx.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Note 3) 0 0. b JOG operation, positioning operation, programmed operation, DO forced output. (Note 1) # #. b (Note 3) Test operation mode Motor-less operation # #. d # #.

Title not found

I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.-'l I lgh pr;iirr" lype, 15W coil I I at"hirg ly,pe I ),t.rra o tor. lW coil I o\,, walr rype 0 5W;o I a a ' t I o " o o c i o d o u b l e ' o l F n o ' o o v d a I 6 B v o n d o o l p d . " o I ' o' 1 .'|o-c I Coil voltages EtrT 'Consull SMC for available volages.

MB1

D D D D B B B Specifications and dimensions other than the above are the same as the standard type.

MHZ

MHZ MHF MHL MHR Hysteresis Hysteresis Switch operating position (ON) Switch operating position (ON) MHK Switch reset position (OFF) Switch reset position (OFF) MHS Hysteresis (mm) D-F9W(V) D-F9BAL D-Y7W(V) D-Y59A/B D-Y69A/B D-Y7P(V) MHC D-M9(V) D-F8 ON position set when red light is turned on ON position set when green light is turned on ON position set when red light is turned on ON position

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

Compact Cylinder/Guide Rod Type Series CQM

Hs A B (mm) Proper Auto Switch Mounting Position D-A72/A7H/A80H D-A73C/A80C/F7 D-J79/F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL/F7BAVL Auto switch model D-A73 D-A80 D-F7NTL D-A79W D-P4DWL A A 9.5 13.5 11.5 14 18 21.5 B B 6.5 9 12 15 18.5 24.5 A 14.5 18.5 16.5 15 19 22.5 B 11.5 14 17 16 19.5 25.5 A 6.5 10.5 12 11 15 18.5 B 3.5 6 8.5 12 15.5 21.5 A 9 7 9.5 13.5 17 B 4.5 7.5 10.5 14 20 Bore size

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Air Slide Table Series MXQ

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 75 100 40 50 150 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 MXQ8 26 2 2 6 10 25 12 12 16 20 36 35 11.5 MXQ12 34.5 34.5 18.5 8.5 8.5 15.5 15.5 28.5 18.5 18.5 25.5 44.5 44.5 25.5 15.5 MXQ16 27.5 45.5 45.5 24.5 14.5 14.5 14.5 20.5 34.5 24.5 24.5

21

. 6.8 to 11.5) D-C73C/C80C D-H7C Auto switch Hs Auto switch Hs B A B A 13 Series CM3 Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto Switch Proper Mounting Position (mm) Auto switch model D-A3lA D-A44A D-G39A Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore