Flow Range: 10 (1~10l/min), Thread: N (NPT Thread), Port Size: 01 (Port Size 1/8), Wiring Specification: N (w/o Lead Wire)

Flow Range: 10 (1~10l/min), Thread: F (G thread), Port Size: 01 (Port Size 1/8), Wiring Specification: N (w/o Lead Wire)

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BE3 (B+E3)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)]

Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Indicator Light: L5 (LED/24 VDC), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

.: 01 (1/8"), Port Size/Applicable Tube: 32 (10-32UNF Thread)

.: 01 (1/8"), Port Size/Applicable Tube: 32 (10-32UNF Thread)

.: 10 (Ø10), Port Size/Applicable Tube: 01 (R1/8, Thread Connection), Sealant: S (Sealant)

Series: 20, Material: Brass Body, NBR Seal, Class B Coil, Stations: 10 Stations, Port Size: 01 [1/8 (6A)], Thread: NPT, Option: -, CE Compliance: -

Series: 20, Material: Brass Body, NBR Seal, Class B Coil, Stations: 10 Stations, Port Size: 01 [1/8 (6A)], Thread: G, Option: -, CE Compliance: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 3 (270°), Thread: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Indicator Direction: 1(180°), Thread: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8")

Body Size: 1 (M5x0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread: R (or Metric), Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8"), Seal: w/o Sealant

Body Size: 1 (M5x0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread: R (or Metric), Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8"), Seal: w/o Sealant

Body Size: 1 (M5x0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: R (or Metric), Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8"), Seal: w/o Sealant

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: T (NPTF)