VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Booster Regulator/Air Tank

port 3/8" Tank OUT port 3/8" Inspection port 3/4" (With plug) ARJ VBAT05A(N)1-E-X105 VBAT05S(N)1-E-X105 Safety valve (Supplied with product) AR425 to 935 Booster regulator IN port 1/4" Booster regulator IN port 1/4" Safety valve port 1/4" ARX EXH: 1/4" EXH: 1/4" (370) (370) OUT OUT AMR (307) (307) 257 60 Inspection port 150 148 163 ARM 4 x 11 4 x 11 32 32 3/4" (With plug) ARP 100 100 200

HRX-OM-S004

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker] . 4-2 4.2.3 For HRS100/150-**-20-B1,HRS100/150-**-40/46 . 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the

HRX-OM-Q026

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B Earth leakage breaker . 4-2 4.2.3 HRSH--20-B1 HRSH--20-S and HRSH--40. 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.2.5 Setting of pump operation mode . 4-3 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-4 4.4 Operation Start and Stop

HRX-OM-T002

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker], HRS090--40/46. 4-2 4.2.3 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the product . 4-8 4.5 Check items during startup

HRX-OM-R026

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-3 4.2.3 Setting of pump operation mode . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Starting and Stopping . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the product . 4-8 4.5 Check items after starting . 4-9 4.6 Adjustment

HRX-OM-W032

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-3 4.4 Operation Start and Stop . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check Items during Startup . 4-8 4.6 Adjustment of Circulating

Series AP500

Delivery pressure Bonnet option Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Code Bonnet Standard Panel installation 4) 01 No code P Material 4) Panel mounting hole: dia 1.56 inch (39.6 mm).

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 9 Booster Regulator Series VBA Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 Silencer (Option) 113 113 IN port Rc 1/4 IN port Rc 1/4 OUT port Rc 1/4 23 27 23 27 OUT port Rc 1/4 22 22 4 x 5.5 EXH port Rc 1/4 60 40 60

HRX-OM-M090

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

HRX-OM-R016

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

HRX-OM-W038

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-R005

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-W058

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter