VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

ASR

rotations Meter-in Type (Inlet Pressure: 0.5 MPa) ASQ530F ASQ430F ASQ630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 400 Effective area mm2 Effective area mm2 Effective area mm2 6 12 1000 15 300 8 4 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle rotations Pressure Characteristics (ASR) ASR430F,

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

Booster Regulator/Air Tank

Flow-rate Characteristics Flow-rate Characteristics VBAT05A 2 1.6 0.1 1.4 Outlet pressure (MPa) Outlet pressure (MPa) P1 = 1.0 MPa 1.2 Max. pulsation range (MPa) P1 = 0.8 MPa 0.08 P1 = 0.75 MPa P1 = 0.7 MPa 1 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.5 MPa 1 0.8 P1 = 0.4 MPa 0.06 P1 = 0.3 MPa P1 = P2 0.6 P1 = P2 0.04 0.4 0.2 0.02 VBAT05A 0 500 1000 1500 2000 2500 3000 0 100 150 50 Outlet air flow

PSE57  Series Pressure Sensor for General Fluids

Temperature characteristics (25C reference) 2%F.S. (0 to 50C) 3%F.S. (10 to 60C) 3% F.S. (0 to 50C) 4% F.S. (10 to 60C) 5% F.S. (10 to 60C) Accuracy Enclosure IP65 Withstand voltage 500 VAC for 1 minute between terminals and housing Insulation resistance 100 M or more (500 VDC measured via megohmmeter) between terminals and housing Operating temperature range Operating: 10 to 60C, Stored:

FHM

Contaminant concentration of used fluid: 500 ppm (initial concentration, percentage by volume) 4. Number of separators: 2 pcs. (applicable fluid storage volume of 100 L/unit) Based on the elimination ratio data for the FHM-100 and the point where the 500 ppm line and flow-back count 30 line intersect (one hour after starting operation), the result is 75%.

PF2A

VDC Mega) between external terminal and case. 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

PSE57  Series Pressure Sensor for General Fluids

Temperature characteristics (25C reference) 2%F.S. (0 to 50C) 3%F.S. (10 to 60C) 3% F.S. (0 to 50C) 4% F.S. (10 to 60C) 5% F.S. (10 to 60C) Accuracy Enclosure IP65 Withstand voltage 500 VAC for 1 minute between terminals and housing Insulation resistance 100 M or more (500 VDC measured via megohmmeter) between terminals and housing Operating temperature range Operating: 10 to 60C, Stored:

Sine Cylinder Series REC

76 0.7 0.1 0 500 300 1000 1500 81 75 66 51 0.3 REB Cylinder stroke (mm) G 60 55 49 37 0.5 REC The above curve in the graph refers to P = 0.5 MPa of supply pressure.

2-Color Display Digital Flow Switch Series PFM

(with no condensation) Withstand voltage 1000 VAC for 1 min. between external terminal and case 50 M or more (500 VDC Mega) between external terminal and case Insulation resistance Without orifice: 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

3

(with no condensation) 1000 VAC for 1 minute between terminals and housing 50 M7 or more (500 VDC measured via megohmmeter) between terminals and housing Insulation resistance Standards and regulations CE marking, UL (CSA), RoHS Note 4) When the temperature sensor PPS, Stainless steel 304, FKM, SCS13 is used, it will be 250 VAC.

PSxx-OMM0006CN

2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500

Fieldbus system CC-Link compatible SI unit

(No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and F.E. Insulation resistance 500 VDC, 10 M min. between external terminals and F.E. Pollution degree For use in Pollution Degree 3 Environment (UL508) Standard CE, UL(CSA), RoHS Weight 170 g 175 g 1: All unused connectors must have a seal cap fitted. 2: The UL agreement temperature is 0 to 50 oC.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

VDC Mega) between external terminal and case Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration in each X, Y, Z direction for 2 hrs., whichever is smaller.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

Mechanically Jointed Rodless Cylinder Series MY1

1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

MXS Series Air Slide Table

Buffer Specifications Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 6 8 12 16 20 25 Bore size (mm) Horizontal mounting 2-20 in/s (50~500 mm/s) 2-12 in/s (50~300 mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 0.67 1.12 2.25 2.92 3.82 4.72 Buffer stroke load (lbf) 1.35 1.80 2.92 3.82 5.62 6.52 Note) Refer to P. 14 for cautions on buffer.

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2