Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 450, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 750, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 850, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 950, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 90, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 67, Table Size Height H(mm): 65, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

XLA Series

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

XL-OMY0002

/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300

IP8001 Series

If hunting is occurring, stop it controller. ) with a PID adjustment (parameter code: 800). See Improved Controllability.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

8 to 500 30 to 1200 20 to 1000 10 to 500 401 to 500 20 to 1100 12 to 750 6 to 400 24 to 1300 16 to 950 8 to 500 30 to 1200 20 to 1000 10 to 500 501 to 600 20 to 900 20 to 540 20 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 1000 10 to 500 601 to 700 20 to 630 20 to 420 20 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 900 10 to 440 Speed [mm/s] Stroke 701 to 800 20 to 550 20

XLF Series

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 17.6 19.7 21.8 23.9 26.0 30.2 34.3 38.5 44.8 -7- 1.3 Construction *Motorless type Component parts Maintenance parts/Grease pack No. Description Material Remarks Apply for Order No.

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.