Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5 15 3 160.5 150 129 16 5 185.5
Refer to pages 166 and 167 for external pilot specifications and built-in silencer. 150 Base Mounted 10-SY3000/5000 Type 45 Note) AC-type models that are CE-compliant have DIN terminals only.
psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501
01 AS2201F -02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer
200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure
Cylinder: DP (Auto Switch/Plate Mount), Model: N (Non-lube), Bore Size: 15mm, Port Thread: Rc (M ø10, ø15), Stroke: 50mm, Cushion: 2 Adjuster Bolts, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Cylinder: DP (Auto Switch/Plate Mount), Model: N (Non-lube), Bore Size: 15mm, Port Thread: Rc (M ø10, ø15), Stroke: 50mm, Cushion: B (Shock Absorbers, 2 pcs), Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Cylinder: DP (Auto Switch/Plate Mount), Model: N (Non-lube), Bore Size: 15mm, Port Thread: Rc (M ø10, ø15), Stroke: 25mm, Cushion: B (Shock Absorbers, 2 pcs), Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Mounting: Tapped on Both Sides, Bore Size: 12mm, Stroke: 50mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Tapped on Both Sides, Bore Size: 12mm, Stroke: 75mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Front Flange, Bore Size: 12mm, Stroke: 50mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Axial Foot, Bore Size: 50mm, Stroke: 200mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Tapped on Both Sides, Bore Size: 20mm, Stroke: 100mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 3m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Axial Foot, Bore Size: 40mm, Stroke: 400mm, Cushion: w/o Cushion 40~63 Bore, Connector: Connector, Cable Length: 0.5m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Mounting: Front Flange, Bore Size: 20mm, Stroke: 50mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 3m, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Both Ends Tapped, Bore Size: 40mm, Port Thread Type: Rc, Stroke: 200mm, Body Option: Rod End Male Thread, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Both Ends Tapped, Bore Size: 50mm, Port Thread Type: Rc, Stroke: 150mm, Body Option: Standard (Rod End Female Thread), Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Foot, Bore Size: 32mm, Port Thread Type: Rc, Stroke: 200mm, Body Option: Standard (Rod End Female Thread), Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Magnet: Built-in, Mounting: Both Ends Tapped, Bore Size: 40mm, Port Thread Type: Rc, Stroke: 125mm, Body Option: Rod End Male Thread, Auto Switch: F79--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -