HRX-OM-M090 Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Potential malfunction may occur if a rectified AC with voltage rise (dv/dt) at zero crossing exceeds 40V /200 sec. Always establish a connection to a ground for safety.
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
Controller CN3 Actuator cable Electric Actuator Motor CN2 5.3 CN4: Serial I/O connector (1) Connection with the teaching box Controller CN4 Teaching box (The 3m cable is provided.) 26 - (2) Connection with a PC Controller setting kit Controller Conversion unit 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200
(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.
Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw
300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.
Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A801H AC30#-D Y300-D Y300T-D E300-#03-D PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -20No.PF-OMY0005-A
SD0 SDA1 SDA2 Serial kit without SI unit Serial kit for Remote I/O 1 to 8 stations (16 stations) FD0 FD1 FD2 FD3 D-sub connector kit (25P) without cable Serial unit: EX126 D-sub connector kit (25P) with 1.5 m cable 1 to 12 stations (24 stations) Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK D-sub connector kit (25P) with 3.0 m cable P SDVB Serial kit for CC-LINK 1 to 8 stations (16 stations
Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.
AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)
Cable length or less customer. + Speed with no load (mm/s) 33 or m ore 100 or m ore 200 or m ore Speed with no load (mm/s) 33 or m ore 100 or m ore 200 or m ore Please refer to Table 1 Applicable auto switch Select D, built-in magnet, when the auto switch is required. Select Nil, no magnet, when the auto switch is not required.
250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-309 (One-touch
l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!
TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 Size PAX C D, T G, C T
Fitting screw size: M2.60.45 P3 (D-sub9 female receptacle) Cap P2 (CH2 D-sub25 female receptacle) P1 (CH1 D-sub25 female receptacle) Power cable Serial RS-485 or RS-232C cable Ferrite core(accessory) Rear CH2 contact signal / Analog cable CH1 contact signal / Analog cable Figure 3-8 Power Cable Insertion and Communication Cable Connection Do not drop a screw or washer in the electrical unit
(mm) A B C D E F G H J L Port size Bracket part no.
*The D-A9/M9/P3DWA auto switches are shipped together, (but not assembled).