RSH

***D-A7l, D-A8l, D-F7l and D-J7l are available as option. 4.3-2 Heavy Duty Stopper Cylinder Series RSH Models Applicable auto switch Construction Action Bore size (mm) Reed switch Solid state switch Rod end configuration Mounting Fixed mounting height D-Y5 D-Y6 D-Y7 Double with spring Single/spring extend Flange 20, 32 50, 63 80 D-Z7 D-Z8 Lever with built-in shock absorber MK/MK2 Specifications

70astamb1

80 100 No. of auto switches mounted Type Auto switch model Auto switch model 32 40 50 63 80 100 2 (Different sides, Same side) D-Z7/Z80 Reed switch 15 25 10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 5 5 5 5 6 D-Y7BAL

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

C92

2 (On different faces or same face) 15 130 125 120 95 70 25 75 D-F5NTL 1 10 D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 70 25 75 10 1 1.12-14

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

JXCx-OMU0026

D < Details > Position deviation counter in the controller has overflowed. (Position error Alarm) Position error counter overflow (151) RESET and SVON is ON D Check if the actuator travel has been interrupted.Also, make sure that the load, speed, acceleration and deceleration are within the range of the actuator.

VEX1

1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)

AIR CYLINDER

Parts list * is different from standard type (C(D)S2) No.

Water-cooledThermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P2: Serial RS-485 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 25 (Female receptacle) Power cable entry Rear side 116 Common Specifications Series HRW Operation Display Panel q Description No.

3 Port Solenoid Valve

D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

DOC1023125

Size Order No. 24 Return Plate Aluminum alloy Coating 25 LE-D-15-1 25 Cover plate Aluminum alloy Anodized 27 32 LE-D-19-1 26 Table spacer Aluminum alloy Anodized 40 LE-D-19-2 27 Belt Replacement parts/Grease pack Order No.

DOC1023126

Description Part Remarks 25 LE-D-19-3 32 LE-D-19-4 27 25 Return box Aluminum die-cast Coating 26 Return plate Aluminum die-cast Coating 27 Belt Mounting Bracket Part No.

S070

D End Plate> Replacement Parts SS070A012A No. o Part no. Description Material Number SS070A-80A-6 Stainless steel Stopper plate 10 < D Side End Plate Assembly > e D side end plate assembly no. < Barb Fitting Assembly > !

Activated Carbon Filter

Bowl assembly specifications 1) AMK20 bowl assembly Semi-standard symbol 6 C 6C Semi-standard symbol: "-" Standard Port thread Semi-standard symbol: "C" Port thread Part No. type Part No. type Rc C2SK-C-D G Rc C2SF-D-X401 G NPT C2SK-C(Z)-D NPT C2SF(-Z)-D-X401 Appearance and part No.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

EXxx-OMY0004

d d e d e e d : Cat. 3 can only be achieved with a redundant sensor (2 series NO contacts) and a connecting cable that meets the fault exclusion requirement of EN13849-2. : The category that can be achieved depends on the sensor used. 18 No.EX##-OMY0004 3.3.8.

S070

Port size OUT port Symbol SUP/EXH port (Applicable tubing) Applicable tubing Write sequentially from the 1st station on the D side.

IDX-OM-W011

XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

ZSE F/ISE

A Input/Output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D. D PNP open collector 2 output + Analog output 70 PNP open collector 2 output + Auto shift input Option Note) Auto shift input is used for the auto shift function.