VCC

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

Compact Rotary Actuator Series CRQ2

2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

JXCx-OMX0009

Operation Examples . 74 13.1 Positioning Operation . 74 13.2 Pushing Operation . 75 14. Start up procedure for battery-less absolute encoder76 14.1 Procedure for start up . 76 14.2 When supplying power for the first time . 77 14.3 Supply of power . 78 14.4 Alarm (group E) is cleared by a cut to the power supply . 79 15.

RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

Pilot Operated

2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

Standard Combinations

Replacement Parts Description Material Y200P-060S Y300 Y300P-060S Y400 HNBR Y200 Seal Y400P-060S Spacer with Bracket (Z) G Center of F.R.L. body C E BB (Y200T only) 1 EE (Y100T, Y200T only) X-X RELEASE X B 2 E X G Seal Y200T Y400T F J A H K Spacer width D Model Y200T Y300T Y400T B 82 96 BB 67 C 29 41 48 D 53 68 81.5 E 24 35 40 EE 33 F 12 14 18 G 5.5 7 9 G 5.5 7 9 H 19 21 26 J 3.2 4 4

Air Combination

,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D -(F,N)02~(F,N)04(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC50(A)-(F,N)06(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,

VEX1

Grommet terminal Conduit terminal DIN terminal a Model b c d e f g h i j VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 1983.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

JXCx-OMT0062

I sens ALM (1-195) E Power off An overflow of the position error counter inside of the controller is occurred. Err overflow (1-196) E Power off Make sure there are no obstructions that interfere with the electric actuator movement. Also, make sure that the load, speed, acceleration and deceleration are within the range of the electric actuators.

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Cylinder

~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In . L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIO

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code