Water-cooledThermo-chiller

HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products REMOTE e [ENT] key Decides the settings. START/STOP [G] [H] key Moves the cursor and changes the setting values. RUN [E] key Moves the cursor. r A L A RM [REMOTE] indicator Lights up when the unit is in the remote status.

IZS30_eng

Frequency: 33Hz Ionizer depth direction -Installed position of targets static charge mm HFE H E E GFE G0E E FEE FEG0E E GFEH E E HFE Targets work of static charge Charged plate dimensions: 150150mm Capacity:20 @ F Meas.

XM, XY

A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177 B 80 100 117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268

20

KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 Nozzle size 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 1.5 2 1.5 2 1.5 2

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

3

2 q w e r t y !1 !0 o i u Component Parts No.

Pin Clamp Cylinders

(Unclamping side) Bore size Nil Without lock L With lock 32 32 mm Auto switch type Nil Without auto switch (Built-in magnet) C D-P3DWASC E D-P3DWASE N D-P3DWA L D-P3DWAL Z D-P3DWAZ Guide pin diameter Mounting surface position (viewed from top) For guide pin diameter, refer to Table 1 below.

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch

Series MXP Precision Air Slide Table

Kinetic energy (E)E max.) Allowable kinetic energy E max. : Table 1 Possible to use by E=0.018<E max.=0.045 Load rate 3 3-1 Load rate of moment Wa=W max. Calculate allowable load Wa(N). Wa=112=12 =1 W max.=12 1=2/12=0.167 Allowable load coefficient : Graph 1 Calcurate load rate (1) of moment.

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

High Power Cylinder Series RHC

2 i e !0 o w !6 !5 !4 !3 y r t !1 A A Enlarged view of A Component Parts Description No.

VCW

Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Standard Combinations

Replacement Parts Description Material Y200P-060S Y300 Y300P-060S Y400 HNBR Y200 Seal Y400P-060S Spacer with Bracket (Z) G Center of F.R.L. body C E BB (Y200T only) 1 EE (Y100T, Y200T only) X-X RELEASE X B 2 E X G Seal Y200T Y400T F J A H K Spacer width D Model Y200T Y300T Y400T B 82 96 BB 67 C 29 41 48 D 53 68 81.5 E 24 35 40 EE 33 F 12 14 18 G 5.5 7 9 G 5.5 7 9 H 19 21 26 J 3.2 4 4

Rodless Cylinder for Vacuum Series CYV ø15, ø32

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

180° Angular Style Air Gripper Series MHY2/MHW2

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

VXP21/22/23

High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

“

OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR32l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR32l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 782 Regulator IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR12l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon panel nut