3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

Micro Mist Separator Series AFD20/30/40

Note 2) Bowl assembly for AFD30 to AFD40-06 includes a bowl guard (steel band material). 14-2-44 Micro Mist Separator Series AFD20/30/40 Dimensions AFD20 Bracket (Option) L D G F K M J E B H OUT IN C OUT F.R.L.

Pressure Sensor Controller

E: Contents revised in several places. F: Contents revised in several places. G: Contents revised in several places.

PSxx-OMG0001CN

-2No.PS-OMG0001CN-H / 1 1.5 *3) 3)1 1 -3No.PS-OMG0001CN-H () () () () -4No.PS-OMG0001CN-H () * UL UL1310 2 UL1585 2 UL * FG -5No.PS-OMG0001CN-H * 6 33 () () 30m30m DC(-)() * () CE 050 (5 ) -6No.PS-OMG0001CN-H * 2030 1 LCD * -7No.PS-OMG0001CN-H E DIN 0 1 3 0 NPN2 +15 V 1 NPN2 +420 mA C 2 NPN2 + 3 PNP2 +15 V 2 4 PNP2 +420 mA 5 PNP2 + A B D + 1 2 M SI 1 1 2 L

Digital Flow Switch

[September 2016] E: Contents revised in several places. [August 2018] F: Contents are added.

PFxx-OMP0001CN

6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000 L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*

PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Digital Pressure Switch

E: Change of page number. (page 9) F: Contents revised in several places. G: Contents revised in several places. H: Contents revised in several places. [July 2018] I: Contents revised in several places.

Digital Pressure Switch

Digit (Minimum setting unit) E Error indication With the self-diagnostic function of the Pressure switch, this indicates that there is an error which could cause a switch failure. F Fine adjustment mode Refer to "Fine adjustment of display value". A displayed pressure value can be adjusted within the range of 5% R.D. (5% of the displayed value).

Digital Pressure Switch

at 24 V power supply voltage Min. load impedance 50 -E PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less Analogue voltage output Output impedance approx. 1 k -F PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less Analogue current output Max. load impedance 300 at 12 V power supply voltage 600 at 24 V power supply voltage Min. load impedance 50 -20No.PS-OML0003

2-Color Display

Min. load impedance: 50 Analog current output Max. load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance: 50 The FUNC terminal is connected using a dedicated lead wire (ZS-38-5L or ZS-38-U) when the copy function is used.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

PSxx-OML0002CN

50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G 1 1 1 1 ONOFF ON OFF ON P_1 H_1 [Pa] ON OFF [] -21No.PS-OML0002CN-G <> 1 [P_1][n_1] 1 1 -22No.PS-OML0002CN-G 2[P_2][n_2] (P1LP1H) P1L()P1H() (n1Ln1H) 1 -23No.PS-OML0002CN-G 2[F 0] [F]

Digital Gap Checker

.: 600 kPa 1: Compared with the ISA2 with 0.2 MPa pressure gauge.

ChemicalThermo-con

Signal contents A DC output B DC output C DC output 1) Common to HED003-C2A, HED005-C2A, HED007-C2A RS-485 D DC output E DC output Pin No. Signal contents D C F DC output 1 RS-485 BUS + 5 4 3 DC connector (HED007-C2l) G FG 2 RS-485 BUS 2 1 3 Unused 4 Unused 3.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS500/600 AS420 AS800/900 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 530 Series AS Speed Controller: Standard Type Large Flow In-line Type Construction: AS420/500/600 Construction: AS800/900 AS TMH ASD AS AS AS-FE