SMC Corporation of America
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Test range Thermometer Test equipment Pressure tap Pressure tap Throttle valve on the Flow meter Throttle valve on the downstream side 2d 6d upstream side 20d 7d Fig. (3) Test circuit based on IEC 60534-2-3, JIS B 2005-2-3 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40 40 50 P1 = 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 105 + 40 95 + 40 n = 4, 8, 12, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69

Test range Thermometer Test equipment Pressure tap Pressure tap Throttle valve on the upstream side Flow meter Throttle valve on the downstream side 2d 6d 20d 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 12 VXB Series Flow Rate Characteristics Note) Use this graph as a guide. If an accurate flow rate is required, refer to pages 8 to 12.

VXZ VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40

Test range Thermometer Equipment Pressure Pressure for test tap tap Restrictor Flow Restrictor on the 2d 6d on the meter downstream side upstream side r 20d r 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 32 Series VXN Flow-rate Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 28 through to 32.

VXZ VXS VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 105 + 40 95 + 40 n = 4, 8, 12, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

Copper-free specifications (20-) Shows the products for copper-free with prefix 20-. 20Example) Copper-free specifications 20-CQ2B12-20D Data Copper-free 2. For the detailed dimensions, refer to each series catalog. 3. Please contact SMC for directional control valves, air line equipment, air preparation equipment and others.

-X Centering can be done easily. 13 18 + Stroke 33 20Tolerance h9 8 Rod cover Data CDUJB8-15D 21 13.5 18 + Stroke 38 Compliant for clean room Clean Series 10 CDUJB10-20D 1011-Series CUJ 22 Two auto switches can be installed even for 4 mm strokes. CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.

D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160 D0 0 2 2 4.5 4.5 9.5 9.5 134.5 144.5 89 87.5 88 87.5 -X Operating Range 20D-Z7

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d d Mounting style (3) Mounting style (4) CX L L Cylinder A Cylinder A Auto switch position DAuto switch position Dimensions by Mounting Style Cylinder B Cylinder B (1) (2) Bore size (mm) Auto switch model -X L d L d 20D-A9, D-A9V 0 15 27 (37) 5 (15)

When a “D” is inserted between the “C” and “U” in the part number, this indicates that there is a built-in magnet (e.g., CDU10-20D). Note that for bore sizes ø16 and larger with a built-in magnet, the overall length dimensions (the S and Z dimensions) will extend beyond the standard dimensions (without magnet). Please refer to the catalog for details.

Suffix “-X1391” to the end of the C(D)UK part number (e.g., CDUK6-20D-X1391) to order it. Note) For the “-XC34” suffixed special order product which features a rod end that does not protrude from the plate, a female thread is attached to the plate as before.


MHF2-8D: 2.5 mm
MHF2-12D: 2.5 mm
MHF2-16D: 2.5 mm
MHF2-20D: 3.0 mm
Note 1) The operating range value is the value per finger. Double the value in relation to the workpiece diameter.
Note 2) This value is to be used as a guide, not a guaranteed value.
Note 3) The actual value may vary by up to 30% depending on the operating environment.

Nozzle Diameter: ø1.3mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: Screw-in NPT 1/8, VAC: Screw-in NPT 1/4, EXH: Screw-in NPT 1/4, Accessories: w/o Bracket, w/o Silencer