LEC-OM005xx

screen . 74 (4-2) Parameter group . 74 (4-3) Parameter setting . 75 (4-3-1) Parameter setting screens and how to set the parameter 75 (5) Normal mode Test . 76 (5-1) Test selection screen . 76 (5-2) Test items . 76 (5-3) Test details . 76 (5-3-1) JOG/MOVE . 76 (5-3-2) Return to origin . 78 (5-3-3) Test drive . 80 (5-3-4) Force output . 83 (6) Normal mode Monitor . 86 (6-1) Monitor selecting

Stainless Steel 316 Fittings

KFG2V0122-N01 KFG2V0122-N02 KFG2V0325-N01 KFG2V0325-N02 KFG2V0704-N01 KFG2V0704-N02 KFG2V0906-N01 KFG2V0906-N02 KFG2V0906-N03 KFG2V1163-N02 KFG2V1163-N03 KFG2V1163-N04 KFG2V1395-N02 KFG2V1395-N03 KFG2V1395-N04 Applicable tube 12 14 12 14 12 14 12 14 19 14 19 22 14 19 22 11 19 11 19 16 25 23 31 45 38 51 75 46 59 83 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 16.1 19.8 16.1

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Valve output 14 RXn.F RYn.F Valve output 15 Unit No.0 Reserve RX(n+1).0 RY(n+1).0 Valve output 16 EX600-SCF1 RX(n+1).1 RY(n+1).1 Valve output 17 RX(n+1).2 RY(n+1).2 Valve output 18 RX(n+1).3 RY(n+1).3 Valve output 19 RX(n+1).4 RY(n+1).4 Valve output 20 RX(n+1).5 RY(n+1).5 Valve output 21 RX(n+1).6 RY(n+1).6 Valve output 22 RX(n+1).7 RY(n+1).7 Valve output 23 RX(n+1).8 RY(n+1).8 Valve output

Fieldbus System

thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8,

VQ5000

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) CD2 Note 1) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Fieldbus system EtherCAT compatible SI Unit

System 4 1: Diagnosis of SI unit is generated. 5 1: Diagnosis of IO-Link master unit is generated. 6-7 Reserved 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 Unit 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7.

Digital Flow Switches

0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate

SFOD-OMT0009CN

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

Fieldbus System

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

JXCx-OMT0001CN

-100 LERH30K-3L LERH30K-3 0 (a) ) LEY16RA-75 LEY16RALEY16RA-100 (b) LEFSH() LEFS ) LEFSH25RH-300 LEFS25RH-300LEFS25RH-300 (C) (11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BR LEFS16A-100LEFS16A-100 -15No.JXC-OMT0001CN-C Execute()Execute Check box Execute Apply Apply 3.6 (2) -16No.JXC-OMT0001CN-C (2) 9. 512 2048 / 0 1 0 1 1 4 1 4 11 12 1 2 1 [] 11 1 4096 1 LEY16C-300 2.5mm 1/

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size CD2 Note 1) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

JXCx-OMU0026

[Setting example] (1) Axis 1: 1, Axis 2: 1, Axis 3: 2 The order of returning starts from Axis 1 and Axis 2, then Axis 3. ORIG order 1 to 4 X (2) Axis 1: 1, Axis 2: 1, Axis 3: 1 Four axes return simultaneously. Caution Simultaneous return to origin of 3 axes is not synchronous. Adapter file version Fixed value This is the fixed value for this controller. Do not change the setting.

JXCx-OMT0002

[Setting example] (1) Axis 1: 1, Axis 2: 2, Axis 3: 2, Axis 4:3 The order of returning starts from Axis 1, then Axis 2 and 3, and then Axis 4. ORIG order 1 to 4 X (2) Axis 1: 1, Axis 2: 1, Axis 3: 1, Axis 4:1 Four axes return simultaneously. Caution Simultaneous return to origin of 4 axes is not synchronous. Adapter file version Fixed value This is a fixed value for this controller.

Large Size Vacuum Module: Series ZR

ZX L SET H ZR 59.5 ZM ZMA ZQ 109 (Port exhaust) 114 (With built-in silencer) ZH 1 ZU 1 ZL ZY ZF ZP SP ZCUK 18 20 ZR1 -D AMJ AMV For port exhaust 7.2 1 Exhaust (EXH.) port Rc 1/4 AEP HEP S S Related Equipment 75 Digital pressure switch for vacuum Attachment D 109 1 (Port exhaust) 114 1 (Built-in silencer) (75.8) 56 P PD 3 100 (2000) Filter block D Dimensions not indicated are identical to

Plug-in/Plug Lead: Single Unit

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts

JXCx-OMT0005CN

1. 2. 3. 4. 4 - JXCD1/ 1. / [][] 1 1.5 *3) *3)1 1 5 - 2 2.1.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 6 4 8 (1) M5 X 0.8 SYJ300 Top (2) SY Body ported Base mounted Rc(PT)1/8 SYJ SYJ500 Top Rc(PT)1/8 VK (1) Rc(PT)1/8 SYJ700 Top VZ Rc(PT)1/4 VT (1) M5 X 0.8 SYJ300 Side VT Rc(PT)1/8 Bottom VP SYJ500 Rc(PT)1/8 Side VG Rc(PT)1/8 (1) SYJ700 Bottom Rc(PT)1/4 VP Rc(PT)1/4 Side Note 1) Only internal pilot style Note 2) Only external pilot style VQ VQZ VZ VS Series SYJ300 Series SYJ500 Series SYJ700

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.