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/N.O. 1 2 3 Station D side U side 4 position dual 3 port valve: N.C./N.O. Manual override Pilot specifications Non-locking push type Nil Internal pilot Nil R External pilot Slotted locking type D Note) 4 position dual 3 port valves are not available with external pilot specification.

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

(One station of programmable driver remote device station) (c) Max. number of connected units: 42 Note that the following conditions must be satisfied. {(1 a) (2 b) (3 c) (4 d)} 64 a: Number of 1-station occupying units b: Number of 2-station occupying units c: Number of 3-station occupying units (not available for LECSC-) d: Number of 4-station occupying units (not available for LECSC-)

Withstand voltage 500 VAC for 1 min. between FE and all accessible terminals to IEC 61131-2 Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) Atmospheric pressure Operation: 80 kPa to 108 kPa (under 2000 m) Storage: 66 kPa to 108 kPa (under 3500 m) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

VT VP How to Order Manifold Assembly (Example) VG VP D side U side 1 3 4 5 Stations VQ VQZ215-5L 4set VQZ 2 VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-5 1 set (Blank plate assembly) VQZ215-5L 4 sets (Single solenoid) VZ VS Prefix "" mark to valves etc.to be assembled on the manifold. Write sequentially from the 1st station on the D side.

Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A801H AC30#-D Y300-D Y300T-D E300-#03-D PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -20No.PF-OMY0005-A Do not apply torsion or bending moment other than the weight of the product itself.

"#$ %&' % & ' ( ) * + % & ' ( ) * + Series VQD1000 Dimensions/Base Mounted Plug lead manifold unit (VV4QD15-) Lead wire length 300 mm (P,R port) For latching Indicator light B C A B C A B C A B C A B C A 2 x 4.5 (Mounting hole) (59.7/latching type) 57.5 52.5 3(R) 51 3(R) 16 9 32 1(P) 17 1(P) 10 10 P = 11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-11 VQZ100/200/300 Body Ported How to Order Manifold VQZ200/300 VV3QZ 2 2 08 C D Series DIN rail mount 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO Order DIN rail separately Refer to p.2.10-17 for DIN rail part number.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

There is a raised part on the controller side. (2) Dimensions Actuator side Controller side Protruding part 86 - 15.4 Controller setting cable (1) How to Order L E C W 2 A C Communication cable L E C W 2 U USB cable PC Communication cable (LEC-W2A-C) USB cable (LEC-W2-U) Controller configuration software USB driver Download from SMCs website https://www.smcworld.com (2) Operating environment

D-J51: 5ms or less MHZ2 Lead Wire Length MHZJ2 How to specify lead wire length MHQ (Example) MHL2 L D-A73 MHR Lead wire length 0.5m 3m L 5m Z N MHK MHS None Applicable to only connector type switch D-C MHC2 Note 1) Lead wire length Z: 5m Applicable to Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73 (C) (H)/A80C MHT2 Solid state switch: Made to order (Except D-F9, F9lV, F7lWV) D-A53/A54, D-Z73

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VT Specifications VT Fluid Air Body ported type Operating pressure range (MPa) VP 0.15 to 0.7 Internal pilot Max. 50 25 or less 5 Non-locking push style, Push-locking slotted style Ambient and fluid temperature (C) VG Response time (ms) (at 0.5MPa) (1) Max. operating frequency (Hz) VP Manual override Individual pilot exhaust, Common exhaust (pilot and main valve) Not required Free 150/30

M/C Makes it possible to monitor the air flow from the main line to each branch line. A COM COM COM B DC12V GND F.G. R.S. HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.