DOC1023126

Rod side EQY*D is excluded.

Process Valve

Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only 4 Note 1) 4 Note 1) 5 6 Note 1)

Air Slide Table/Long Stroke Type Series MXY

8.5 114 42 33 n QL Model 50 100 150 200 250 200 250 300 350 400 50 300 350 400 100 150 Stroke MXY6 2 3 3 4 54 39 34 59 MXY8 2 44 2 3 4 5 5 39 64 54 34 59 MXY12 2 2 67 3 3 4 4 5 5 37 62 42 47 72 52 77 224 Series MXY Air Slide Table Long Stroke Type Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries

HEC_001W-E

I C o n s t a n t M O D E < 5 0 C 150 sec 7-9 Operation 6. D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. When 0 is set, this function becomes invalid. D C o n s t a n t M O D E < 0 . 0 s e c 7.

MXH Series Compact Slide

D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Proper Auto Switch Mounting Position (Detection at stroke end) MX A B MTS MY MY3A D-A9, D-A9V (mm) D-F9W, D-F9(W)V (mm) D-M9, D-M9V (mm) CY A B Operating range Bore size 16 25 40 63 A B Operating range Bore size 16 25 40 63 B Operating range Bore size 16 25 40 63 A 088.5 084.5 26.5 084.5 22.0 26.5 2 06.5 3.0 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Rotary Table

Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV NPN DC28V type or less At 10mA DC512 0.8V or 100A or Relay 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5 to 28V) At 40mA 2V or less PNP type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

MRQ

3m 0.5m D-A7l, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

Thermo-con

Alarm output connector (ALARM) D-sub 9 pin (pin) Holding screw: M2.6 Pin No.

LX Series Compact Electric Actuators

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m

Rotary Table

Part number of special angle adjustment tool Size Part number 10 P8910195 20, 30 P8910295 50 P8910495 Table 11. Special tool dimensions [mm] Part number A B C D E P8910195 50 10 16 10 12 P8910295 60 12 18.2 11 14 P8910495 80 15 24 17 19 Special tool Fig. 7 -33- Piping Figure 8 and Table 12 show locations and sizes of piping ports. Ports can be selected from two sides.

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color TD+ RD+ TD RD 1 3 Signal name Yellow White Orange Blue 1 2 3 4 1 2 3 4 2 4 2 4 1 Plug connector pin arrangement D-coded 3 Plug connector pin arrangement D-coded Metal parts Metal parts Shield Connections (Straight cable) 226 A Communication Cable/Connector Communication Cable 14.8 14.8 For CC-Link 44.5 5000 50 22.5 rPCA-1567720 (Socket) 1 2 3 4 Socket connector pin arrangement

COQ2BP

S: B Throo h hole standard A Both ends ta d L Foot mount F Rod side Iia e Head side flan e Type of Auto Switch , No auto SWitch built in (high magnetic Bore Size D Clevis mount . ~ field resIstance ma net 50 50mm P7G 0P10 63 63mrn l'l14C D-P74 80 80mm i P7 D-P75 Cylinder Stroke D-PS P8!

Soft Start-up Valve

D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5