Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

CRB1/Size: 10, 15, 20, 30

Vane style S D Single vane Double vane Size 10 15 20 30 Rotation angle Application Symbol Rotaion angle 90 180 270 90 100 90 180 270 90 100 Single vane Double vane Flange Brackets Part No. (Refer to p.1.1-6 for further information on specifications.) Ass'y part No.

pa

D (for PA3000 automatically operated type) Discharge rate 5 0.040 125 (cycles/min) = = Cycles per minute Discharge per cycle Reference life cycles 1 1 = x x Service life Cycles per minute 8 (Daily operating time) 60 100,000,000 1 1 = x x 125 60 8 1666 days = 17-5-145 Series PA/PAX/PB Precautions 5 Be sure to read before handling.

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Thermo-chiller Series HRZ Fluorinated Fluid Type

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Bore sizes 32 to 63 are available for the D-P3DWA. Since there are other applicable auto switches than listed, refer to page 515 for details. For details about auto switches with pre-wired connector, refer to pages 1192 and 1193.

MVGQ

+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 175mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Bore Size: 40mm, Thread Type: TN (NPT), Stroke: 175mm, Cushion: 2 pcs. Adjuster Bolt, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: With bumper on both ends, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet, Port thread

Bore Size: 50mm, Port Type: Rc (PT), Stroke: 175mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 175mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Bore Size: 50mm, Port Type: Rc (PT), Stroke: 175mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Magnet: Built-in, Mounting: Axial Foot, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: NPT, Stroke: 175mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Axial Foot, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 80mm, Thread: NPT, Stroke: 175mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Double Clevis, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: Rc, Stroke: 175mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: With bumper on both ends, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet, Port thread

°C, Valve, Single, Non Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb

CLJ2

Bore size Lock operation 16 16 mm Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Standard stroke (mm) Port location on head cover Nil R Perpendicular to axis Axial direction Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.