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The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function. *3 The analog output current from the connected

ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Ventilation (H/X inlet) Ball tap Expansion TS E Circulating fluid return port valve A Level switch Expansion Fluid level gauge valve B Customer's E machine Temp. sensor (Ref. discharge (Heat load) Press. sensor (Outlet) TS PS TS Heat Temp. sensor Circulating fluid outlet port exchanger (Outlet) Press. sensor (Ref. low press.)

We hope you found both the iii PneuAlpha iv PneuAlpha Guidelines for the safety of the user and protection of ECC-PNAL-PCS/WIN-E This manual provides information for the use of ECC-PNAL-PCS/WIN-E. The manual has been written to be used by trained and competent personnel.

[dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

[dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19

4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

Air flow direction: z Block, x c Conduit terminal (TS) Coil When the coil y is energized the plunger u is pulled down depressing the spool e via the overtravel assembly i and the air passage between port z and port x is opened and port c is blocked.

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

If this occurs, wait until the oil temperature rises by a warm-up operation, and confirm if the differential pressure indicator and switch can be reset, then start the operation. (20 C or more is the guide.)

Under certain circumstances, the use of an electronic type pressure gauge is recommended. 22 0 0 43.5 58 72.5 87 101.5 Supply pressure (psig) 142 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Dimensions Dimensions Symbol A B C D E F G H J K M P Q R Model NARM1000 .18 .98 1.34 .83 .71 2.20 .63 .35 .71 .75 2.05 .35 .45 .19 (4.5) (25) (34) (21) (18) (

83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies with MIL-C-24308 JIS-X-5101 Applicable connector Internal wiring +COM, COM Weight W (g) Note 3) n1: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail W = 3.2n1 +

L E C T 1 3 J G S 1 S 1 2 J 2 E 2 3m 1 6.43 2 6.3 9 TB 12 - 3. 3.1 (1) TB Ver.5.11 TB Ver2.1LECPA No.0 1 LECPA TB Ver2.1LECPA No. 1 ) TB Ver1.** TB Ver2.**/ / (2)Tree TB Ver.5.11 MENU Data No. 2 Data Monitor JOG Test Alarm Setting Ver1.** Ver2.** 12 TB Ver2.1*LECPANo.0 Monitor No. 2 JOG Test 1 LECPATB Ver2.1*LECPA Alarm Setting Ver1.