Precision Regulator

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

CJ1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Single acting 6-2-4 5, 10, 15, 20 MB MB1 How to Order/Double Acting CA2 CJ1B 4 5 U4 CS1 C76 Applicable tubing Mounting style C85 Tubing material Size O.D. 4 mm 4 mm Basic style B Symbol Bore size 2.5 mm 2.5 mm Polyurethane Soft nylon Bore size 4 C95

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HEC-OM-Y008

Fluid: Water Flow rate: 1L/min Fluid: Water Flow rate: 1L/min Low noise fan option When dispose the product, contact an industrial waste disposal company 800 800 Aug V yV ZV AV BV CV DV . for disposal of the product. To minimize the risk, drain the fluid from the product when it is scrapped.

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

lPSMt

North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) North Amerlcan BranOh Oflaces For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics Inc. (Atlanta) SMC Pneumatics lnc. (Cleveland) SMC Pneumatics Inc. (L.A.) SMC Pneumdtics Inc.

lPSMt

North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) North Amerlcan BranOh Oflaces For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics Inc. (Atlanta) SMC Pneumatics lnc. (Cleveland) SMC Pneumatics Inc. (L.A.) SMC Pneumdtics Inc.

VZ1000

VZ1120-D-M5 (Lead wire length) Applicable cable O.D. 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 3-3-12 Series VZ Made to Order Specifications: Please contact SMC for detailed specifications, dimensions, and delivery. 2.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C D E F Dimensions Part no.

Large blow and

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

Digital Flow Switch ( compatible)

[L/min]) (PD) = (Pr b) / a = [800 0] / 0.25 = 3200 -75No.PF-OMY0002 IO-Link parameter setting IODD file IODD (I/O Device Description) is a definition file which provides all properties and parameters required for establishing functions and communication of the device.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

The D-A9/M9/M9W/M9A auto switches are shipped together, (but not assembled). (However, only the auto switch mounting brackets are assembled before shipment.) Note) D-Y59A, Y69A, Y7P, Y7W, Z7, Z80 type cannot be mounted on the CP96 series.

3

1200 1600 2000 0 100 200 300 400 500 0 200 400 600 800 1000 Flow [L/min] Flow [L/min] Flow [L/min] IN Side Straight Piping Length and Accuracy (Reference Value) The piping on the IN side must have a straight section of piping with a length of 8 cm or more.

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

D-A9, M9, M9W, M9A auto switches are shipped together. (not assembled).

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

(Only the auto switch mounting brackets are assembled before shipment.) * The D-Y59A, Y69A, Y7P, Y7lW, Z7l, Z80 cannot be mounted on the CP96 series.

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

IN20267

Figure 18-1 SMD Cover 49 - IN20267 Figure 18-2 Defualt Switch Position all up 50 - IN20267 Revision History Revision Description Date Author(s) 1.0 Initial release for Ethernet/IP MPC 010/11/2016 SMC US EPG SMC Corporation of America 10100 SMC Boulevard Noblesville, IN 46060 Phone: 1-800-SMC-SMC1 (1-800-762-7621) URL: www.smcusa.com 51 -

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.