Ionizer Nozzle type IZN10 Series IZS

Suitable for static neutralization at a long distance (max. 500 mm).

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

PFxx-OMS0001CN

[P_2][n_2] [] [H_2] [] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMS0001CN-A b. () [P2L][n2L] [] () [P2H][n2H] [] [H2] [] [F 2] OUT2 500 L/min OUT1 -39No.PF-OMS0001CN-A c. 0999,999,999 L 3 /OUT1 (3 ) [P2AH][n2AH] [] 1 (6 ) [P2AL][n2AL] [] 1 [F 2] OUT2 -40No.PF-OMS0001CN-A d.

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

15

, 500 750 15 Helical insert thread 1000 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Non-lubricated exterior (without dust seal) 25 1500 Outside of cylinder tube with hard chrome plated 32 Non-lubricated exterior (with dust seal) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 1500 40 Switch rails on both sides (with 2 pcs.)

LEKF-OMZ0035

AC servo motor Motor typeV*) Model LEKFS25V6 LEKFS32V7 LEKFS40V8 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310

VZS

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

OMR0032

There is a raised part on the controller side. (2) Dimensions Actuator side Controller side Protruding part 86 - 15.4 Controller setting cable (1) How to Order L E C W 2 A C Communication cable L E C W 2 U USB cable PC Communication cable (LEC-W2A-C) USB cable (LEC-W2-U) Controller configuration software USB driver Download from SMCs website https://www.smcworld.com (2) Operating environment

ZSE30A(F)/ISE30A

Analog Output ISE35 Voltage output Current output A B C Range For vacuum pressure Rated pressure range PSE 0 0.0 to 101.0 kPa 101 kPa 5 20 Analog output [mA] Analog output [V] IS For compound pressure 100.0 to 100.0 kPa 100 kPa 100 kPa For positive pressure ISG 0.100 to 1.000 MPa 0.1 MPa 0 1 MPa ZSM1 1 0.6 4 2.4 B A C B A C Pressure Pressure Functions (Refer to pages 41 and 42 for details

Low Differential Pressure Sensor

to 500 kPa 50 to 500 kPa A sensor may be unconnected or mis-wired.

3

L/min 2100 L/min PFMC7202 Rated flow range Set flow rate range Displayable range Analog Output Flow/Analog Output Output A B C Voltage output 1 V 1.04 V 5 V C Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min B A 0 Flow Minimum flow of rated flow range

PFxx-OMP0001CN

[P_2][n_2][] [H_2][] [F 2] OUT2 500 L/min OUT1 -37No.PF-OMP0001CN-F b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMP0001CN-F c. 0999,999,999 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -39No.PF-OMP0001CN-F d.

CE2

C J G5-S Auto Switch Mounting Bracket Part No.

CYP

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))