Compact Vacuum Unit Ejector/ Vacuum Pump System (N.C.) port Port size Rc1/8 Supply from one side 10 NPT1/8 12 12 Supply from both sides 12 G1/8 Supply from one side 10 8 10 M50.8 Supply from both sides 12 10 12 Note) The number of stations shown above is to satisfy the specifications of the ejector performance at the standard supply pressure.
Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1 13.1 SAFETY INSTRUCTIONS FOR USE . 13-1 13.2 SPECIFICATIONS . 13-1 13.3 MAINTENANCE . 13-2 Chapter 14 Inspection record . 14-1 14.1 INSPECTION RECORD .
6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX
Contact signal Table 8-12 Contact Signal Item Specification Connector No.
5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT 29 37 46 57 56 71 89 109 5.5 6.6 9 11 23 27 31 37 12 16 18 21 144 164 177 209.5 MLUL25 MLUL32 MLUL40 MLUL50 LS + Stroke X Y X Y LX LZ 4-LD ZZ + Stroke Front flange type 2-FD FY FV (mm) FV FT FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FD Model 8 8 9 12 24 28 32 39 5.5 7 9 11
VFS210 AR425 Nylon 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 Nylon 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 Nylon 12/9 AN400-04 AS420-04 Please install the silencer responding to it necessary. 13 3.
AM20 AM30 AM40 12 16 14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure
T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-2 IDX-OM-W094 1.2.4 IDFA60/70/80/90 Series 1-3 IDX-OM-W094
Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR
Tighten others with 0.60.05Nm. -27- 12. Domensions 12-1.
Do not pull the handle with excessive force. 4) The retaining mechanism works when the vacuum release flow adjustment needle makes 12 revolutions from the completely closed state, and it is not possible to turn any more. The needle may break if it is rotated more than 12 revolutions. 5) Do not use tools such as pliers to tighten the handle.
PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 12 to 24 VDC UP 2 + White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88
PFA7--27(-M) FLOW SWITCH UP 34 54 44 SET Brown OUT1 OUT2 DOWN FOR AIR Main circuit OUT1 Black + 12 to 24VDC LED Green 24 2-Port size OUT2 Load White Load 4-4.5 40 50 LED Red Blue PFA7--67(-M) (41.5) Brown Load Load Black LED Green + OUT1 12 to 24VDC Analog output White LED Red Blue PFA71--28(-M) 42 Brown 4 OUT1 Black + 2-3.4 12 to 24VDC LED Green 43 Analog output Load White Load Flow
YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80
For detailed specifications, please contact SMC. 100 V Relay, PLC Yes 100 V, 200 V 12 V 24 V (B54) B54 B73C 2-wire 12 V C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF PLC Grommet (B59W) G79 Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V K79 Grommet 2-wire 12 V K79C Connector Relay, PLC Yes 24 V 3-wire (NPN) 3-wire (PNP) IC circuit
PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.
to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.
Voltage Symbol Type 5 24 VDC 6 12 VDC Note) For symbol, refer to page 741.
ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.
18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.