Rotary Cylinder Series MRQ Size: 32, 40 1

range (mm) 8 7 Linear motion parts 6 Linear motion parts Hysteresis (mm) 2 1 1 8.5(9) 11(11.5) 9 11.5 9 11.5 Proper mounting position A (mm) D-F7 /F7 V/J79/J79C/F7 W/ F7 WV/J79W/F7BAL/F7BAVL Rotary motion parts Rotating angle D-A7/A8 D-F79F 40 32 7 4 29 36.5 36 45.5 Rotary Size Rotary motion parts 55 46 10 7 24.5 (25) 32 (32.5) 31.5 (32) 41 (41.5) 28 27 4 3 25 32.5 32 41.5 32 40 32 40 Operating

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Class Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Class Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/

Vacuum Pad

A B D Weight [g] ZP3P-T25PTSFK10-B5 33 69 23 28.5 ZP3P-T25PTSFK20-B5 43 107 51 42.2 ZP3P-T35PTSFJM-B01 ZP3P-T35PTSFKM-B01 ZP3P-T35PTSFJ10-B01 ZP3P-T35PTSFK10-B01 ZP3P-T35PTSFK20-B01 ZP3P-T35PTSFJ20-B01 Width across flats 13 Rc1/8 Width across flats 13 Width across flats 13 Rc1/8 Width across flats 13 K: Non-rotating D-D J: Rotating D-D B B Width across flats 19 Width across flats 19 D D D

IDX-OM-W011

C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011

Thermo-con/Rack Mount Type

(Page 18) Tank capacity Approx. 1.3 L Port size Rc3/8 Fluid contact material Stainless steel, EPDM, NBR, Ceramics, PPE, PPS, Carbon, PP, PE, Nylon, POM, PVC Temperature range 10 to 35C (No condensation) Facility water system Pressure range Within 1 MPa Required flow rate*3 10 to 15 L/min Port size Rc3/8 Fluid contact material Stainless steel 304 Power supply Single-phase 100 to 240 VAC 10%

Electric Slide Table / High Precision Type 《 AC servo motor 》

(For with lock) (10)I/O cable length * [m] Without cable Nil Without cable (Connector only) H 1 1.5 -7- 1.2.2 Specification LESYH*(D,R,L)*V Motor type V6/V7 Model LESYH16*V6 LESYH25R/LV7 LESYH25DV7 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N](Set value: 45 to 90%) *1 65 to 131 127 to 255 79 to 157 154

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

240

4 8 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 9 Motor plate Aluminum alloy Anodized 10 Guide ring Aluminum alloy Size 10 only 11 Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper !2 e w i !1 t !

4/5 Port Air Operated Valve Series SYJA3000

Ported/SS5YJ3-41Stations -M5, [ ]: AC 91.7 [96.1] Approx. 300 (Lead wire length) C4 N3 For (Built-in One-touch fitting) Grommet (G) For M5 (Pitch) P = 10.5 16 1/8 (P port) 10 Manual override 1/8 (P port) 36.4 10 10 61.7 [63.9] 60.9 [63.1] 21.4 78.8 [83.2] R R B B B B B 7.8 39.5 38.7 36.5 11.5 18 4.3 21.5 (4.4) P A A A A A 3 1/8 (R port) (Station n) (Station 1) 2-4.5 (For mounting) L1 L2

RB/RBL/RBQ

C J G5-S CV MVGQ CC Series Variations Series Basic type With cap or bumper (Option) Stopper nut (Option) Hexagon nut Page Foot bracket RB Series RB J 18-10-2 Series RB D-X Coolant resistant Series RBL 18-10-8 20(Except 08 type) Series RBQ Data 18-10-10 Series RBQ 2 Hexagon nuts are attached for Series RB and standard models RBQ. 10-18-1 2 Shock Absorber Series RB Specifications Model RB0805

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

22 3.2 6 8 10 12 3.2 4 6 8 10 31.5 32 35 39 43 D VT Color: White VP VG L DIN rail VP 12.5 (Pitch) 5.25 7.5 AXT100-DRS070 As for , enter the number from the DIN rail dimensions table. 25 35 5.5 VQ 12.5 L Dimension L = 12.5n + 10.5 VKF Each manifold can be mounted on a DIN rail.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Action D S Rod end threads Double acting Single acting (spring extended) Rod end female threads (4 without threads) Rod end male threads Nil M Table 2 Auto switch specifications Table 1 Standard strokes Action Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Load voltage Lead wire length (m) Indicator light Wiring

RSH

MK/MK2 RSQ/RSG RSH A CE1 Auto switch mounting position Auto switch model D-Z7l D-Z80 D-Y59 D-Y7P D-Y69l D-Y7PV D-Y7lW D-Y7BAL D-Y7lWV CE2 ML2B Bore size (mm) A B A B A B A B 20 18 8 18 9.5 18 2 18 4 ML1C 32 13.5 10 13.5 12 13.5 4.5 13.5 6.5 50 21.5 12 21.5 14 21.5 6.5 21.5 8.5 REA 63 16.5 31 16.5 33 16.5 25.5 16.5 27.5 80 26 33 26 35 26 27 26 29 REC RHC How to Install an Auto Switch MTS To

MXW Series Long Stroke Slide Table

A Shock absorber and urethane bumper side Dimensions (mm) B A Adjuster bolt D Lock nut C M Adjustment range (mm) 5 Applicable size B A C Model D M 1mm 1mm 21 MXW-A812 8 2.5 6 M5x0.5 MXW 8 15 31 MXW-A812-X11 5 23.5 MXW-A1212 8 2.5 6 M5x0.8 MXW12 15 33.5 MXW-A1212-X11 5 28.5 MXW-A1612 10 3 8 M6x1 MXW16 15 38.5 MXW-A1612-X11 5 34.5 MXW-A2012 13 4 10 M8x1.25 MXW20 15 44.5 MXW-A2012-X11 5 40 MXW-A2512

SFOD-OMT0005CN

/IP IP (0255) 4 SI I/O (8 ) (LEC-T1)(LEC-W2) 5 ENC (16 ) 6 MOT (6 ) (DC24V) (+)(+)(+) (+)(-) 7 PWR (5 ) 8 9 10 MAC EtherNet/IP MAC 11 FE () -13- 3.3

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

head cap screw Note) Please refer to the page 8-19-8 for details on components and replaceable parts for flat cylinders with guides (MGPM, MGPL). 8-24-6 7 Cylinder with Turntable Series MGT Dimensions 4-YY depthYL XAH7 depth XL XB XAH7 a b c d e XAH7 MX XC XL (mm) X X0.02 a b c d e Bore size (mm) MTS XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 MY 2-R3 15.3 23.3

MXH Series Compact Slide

10 4 0.102 10.2 8.18 6.14 4.09 2.05 IN 0.312 31.2 24.9 18.7 12.5 6.23 OUT 16 6 0.268 26.8 21.4 16.1 10.7 5.36 IN 0.487 48.7 39.0 29.2 19.5 9.74 OUT 20 8 0.409 40.9 32.7 24.5 16.4 8.18 IN Minimum Stroke for Mounting of Auto Switches (mm) Applicable auto switch models Number of auto switches mounted D-A9 D-A9 V D-F9 D-F9 V D-F9 W D-F9 WV 1pc. 5 5 5 2pcs. 10 5 10 Weight Table (lb) Stroke (mm

3 Position Cylinder Series RZQ

(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

VCW

Orifice and Port Size Combinations Orifice size (mm) Class Port size Note) T Conduit terminal TL Conduit terminal with indicator light 2 3 4 5 7 10 D DIN terminal DL DIN terminal with indicator light DO DIN terminal (without connector) 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 (8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) Connector Note) 10 is available only for N.C.