Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Manifold Specifications

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

IP8101 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 12 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

CC

E101. 10-17-16

FILTER REGULATOR

-01 G46-10-01 Rc G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G36-10-01 G46-10-01 G G36-4-01 G46-4-01 1 0.2MPa setting G36-10-01-L G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa

CC

E101. 10-17-16

FILTER REGULATOR

-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G G36-10-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting Rc G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

Filter Regulator

Note 4) -10- 6.

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

Common Supply Regulator

Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11 8. Operation and Adjustment 12-13 9. Trouble Shooting 14-15 10. How to Replace the Components 16-21 10-1. Diaphragm Assembly Replacement 16 10-2. Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4.

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

S070

Number No. r t y u i SS070A 01 1A O-ring FKM SS070A-80A-1 10 VFN Port size Clip Stainless steel SS070A-80A-2 10 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel SS070A-80A-4 10 Mounting bracket Stainless steel SS070A-80A-5 10 < U Side End Plate Assembly > w U side end plate assembly no.

MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD47N-8(Z)-A AD47-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

MICRO MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD37N-8(Z)-A AD37-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 14 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Clean Regulator/Fluororesin Type

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 04 06 08 10 12 19 03 05 07 11 13 19 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable