PSxx-OMU0008CN

Rc1/8 M50.8 5 G1/4 A2L B2L URJ1/4 TSJ1/4 -82No.PS-OMU0008CN-D A -83No.PS-OMU0008CN-D C -84No.PS-OMU0008CN-D () 43.602 0.5~7 ()+ 43.602 0.5~7 -85No.PS-OMU0008CN-D () 1~5 -86No.PS-OMU0008CN-D ()+ 1~5 -87No.PS-OMU0008CN-D () 2 (n ) <> 31n +3.5n -1 -88No.PS-OMU0008CN-D <> -89No.PS-OMU0008CN-D () 2 (n ) <> 36n +4n -1 -90No.PS-OMU0008CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

VQ

Latching style Latching style AC () () (+) 100V AC, 200V AC 100V AC, 200V AC Reset B C Set Yellow Yellow Blue Red A A Single solenoid (AC) Latching solenoid (AC) COM. Blue Red Blue Red SOL. C C A set A SOL. Reset Gray Gray Single style B C COM SOL. SOL.

0.01

Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard

Soft start up valve with lock out

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil B A 3(R) DZ 1/2 (AVL4000) 04 G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

High-precision Digital Pressure Switch ( compatible)

[January 2018] C: Contents revised in several places. [January 2018] D: Contents are added. [March 2018] E: Contents revised in several places. [June 2018] F: Contents revised in several places. [October 2018] G: Contents revised in several places. [March 2020] H: Contents revised in several places.

High-precision Digital Pressure Switch

[June 2018] C: Contents revised in several places. [March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

Metering Valve with Silencer Series ASN2

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

IZx-OMV0005

Note (mm) Models A 01 02 01 02 IZN10E06 3.5 IZN10E07 7 28 Doc. no.IZ-OMV0005 16 17 One-touch fitting (Elbow)IZN10E(mm) Models B C D IZN10E-16 22 16 11.5 IZN10E-17 24.5 18.5 12 Female threads for pipingIZN10E-11 Width across flats: 12 29 Doc. no.IZ-OMV0005 L-bracketIZN10-B1 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting

IDX-OM-X004

D E Part No.

Quick Exhaust Valve Series AQ

Applicable tubing O.D. d VCHC ASS ASR ASQ KE TMH M1 L3 L2 L1 D2 Weight (g) D1 Weight (g) D1 L1 L2 L3 L4 M1 M2 Model Tubing O.D. d Model Tubing O.D. d AQ240F-04-04 AQ240F-04-00 12.9 14.3 5.2 39.2 6 4 9.3 5 4 10.0 9.3 39.2 5.2 13.7 23.5 12.9 12.9 AQ240F-06-06 AQ240F-06-00 13.7 15.4 6.2 40.7 8 6 6 10.0 11.6 6 11.6 40.7 6.2 14.7 26.7 13.7 13.7 AQ340F-06-06 AQ340F-06-00 13.7 19.5 6.3 44.8 13 6

VCB

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

ZSE5/ISE5

[J27L PNP open collector SOmA ZSE5B-O-67L ISE5B-[]-26L None (Analog output) 1 ~5V(5%F.S.) 2 output NPN open collector 30V,80mA ISE5B-D-27L Standard Specifications PNP open collector SOmA ISE5B-D-67L ZSE5B ~I ZSE5B Item ZSE5B ISE5B ISE5B .jISE5B With unit change function for use all over the world.

HRX-OM-M005

Fitting screw size: M2.60.45 P3 (D-sub9 female receptacle) Cap P2 (CH2 D-sub25 female receptacle) P1 (CH1 D-sub25 female receptacle) Power cable Serial RS-485 or RS-232C cable Ferrite core(accessory) Rear CH2 contact signal / Analog cable CH1 contact signal / Analog cable Figure 3-8 Power Cable Insertion and Communication Cable Connection Do not drop a screw or washer in the electrical unit

Micro-Mist Separator with Prefilter Series AMH

Port size 01 1/8 B 06 3/4B 02 1/4 B 10 lB 03 3/8 B 14 1 1/2B 04 1/2B 20 28 Table" combination of accessories and made to order specifications Accessories Accessooos I~p~~Tii\,"aR6~~ Applicable models Made to order specifications C 0 J R T AMHl50 AMH2S0 AMH350 AMH450 AMH550 AMH650 AMH850 D C Drain Quide 1/48 -J Accessories N.C. auto drain N.O. auto drain IN-OUT reversal -R 10 0 Element service

VR4151/4152

Output 1 Output 2 A B C Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 14.8 VR1211F-04 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 6.8 VR1211F-06 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 Inch Size Weight (g) Model d D1 D2 L3 L2 D3 L1

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output