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V-band Note 2) 5 Stainless steel FGF-BA01 1 FGF3-40 3 Refer to How to Order on page 47.

11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

-wire(NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) M9BAV M9BA 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of order.

0.4 0.6[Nm]) 0.4 0.6[Nm] -31No.JXC-OMT0001CN-C A B M5X14 (2) () M3 -32No.JXC-OMT0001CN-C (1)D (100) (2)2mm 2 D (3) 40 50mm ()100mm 100 -33No.JXC-OMT0001CN-C 5.

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

2-colour display) Grommet D-M9PW(V) -900 Max.40mA Sequence mounting controller Relay Yes DC1028V , 2.5 Tie-rod Sequence (2-colour Grommet D-M9BW(V) -900 40mA mounting controller display) 31 - 2) Precautions for use When installing the auto switch on the 25A-CDS2 series, pay attention to the following. 1.

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

/8 With sub-plate 1 1/2 With sub-plate 04 53-SY9000 1 (P) (EA) 5 3 (EB) 2-position double Manual override 2 (B) (A) 4 2 E: Push-turn locking lever type D: Push-turn locking slotted type Nil: Non-locking push type (EA) 5 1 (P) 3 (EB) 3-position closed center 2 (B) (A) 4 3 Note 1) (EA) 5 1 (P) 3 (EB) 3-position exhaust center 2 (B) (A) 4 4 Note 1) (EA) 5 1 (P) 3 (EB) Lead wire length 3-position

L \2) Base Mounted Type With Subplate: NVJA3O4-M5 (External pilot port) 0.14\3.5tDia 2 Mounting M 3 x 0 . 5 iPilot s l I :l N : 0.Oa(1)Dia 0.gl (231 (D Symbol 4 Port -'IT7T\TE -T1 5 Port -.ft41\lF o{l7)Fl}o 2 Position Sinsle 2 Position Double Body ported type MITTrrTWh^ ^dTTTfIffTlM ^fft-frrTfTM ^^|TrrT-fnT ^ D l J ./ , i , , , 1 , \ l t < D U-{-4+ll-_\-il + -ri]lllLAll < -Dll/, l,ll,\l <

L \2) Base Mounted Type With Subplate: NVJA3O4-M5 (External pilot port) 0.14\3.5tDia 2 Mounting M 3 x 0 . 5 iPilot s l I :l N : 0.Oa(1)Dia 0.gl (231 (D Symbol 4 Port -'IT7T\TE -T1 5 Port -.ft41\lF o{l7)Fl}o 2 Position Sinsle 2 Position Double Body ported type MITTrrTWh^ ^dTTTfIffTlM ^fft-frrTfTM ^^|TrrT-fnT ^ D l J ./ , i , , , 1 , \ l t < D U-{-4+ll-_\-il + -ri]lllLAll < -Dll/, l,ll,\l <

L \2) Base Mounted Type With Subplate: NVJA3O4-M5 (External pilot port) 0.14\3.5tDia 2 Mounting M 3 x 0 . 5 iPilot s l I :l N : 0.Oa(1)Dia 0.gl (231 (D Symbol 4 Port -'IT7T\TE -T1 5 Port -.ft41\lF o{l7)Fl}o 2 Position Sinsle 2 Position Double Body ported type MITTrrTWh^ ^dTTTfIffTlM ^fft-frrTfTM ^^|TrrT-fnT ^ D l J ./ , i , , , 1 , \ l t < D U-{-4+ll-_\-il + -ri]lllLAll < -Dll/, l,ll,\l

2 3 4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

Tubing O.D. 9 Selection Procedure V x 60 Q Adsorption response time T1 = When the suction flow rate of 53 kPa is obtained from the ZH07DS flow characteristics graph, the leakage volume is 5 l/min (ANR). () Leakage: Adsorption flow (5 l/min) (ANR) Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) Example 2: For obtaining the discharge response time until

0.0210.0 V (2) Analog Output 2 Analog output signal 2 CH2 circulating fluid temperature 0C100C: 010 V *1 CH2 electric conductivity 0.150.0 S/cm: 0.0210.0 V 1: By default. 2: In the case of option D1 "CH1 with electrical conductivity control".

Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

V [l] = (Q Qb/2) x (Tc x K/60) Booster regulator VBA111 VBA200 VBA400 (P3 P2 ) x 9.9 Tank VBAT05 VBAT10 VBAT20 Tc [s] = 100 = 0.5 Conditions: Inlet pressure: 0.5 MPa Outlet side set pressure: 1 MPa Flow rate: Between 0 and max. flow rate 200 V [l] = (841 500/2) x (0.5 x 2/60) = 5 (1 0.8) x 9.9 Select tank with the capacity over V.

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5