Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Thermo-chiller/Rack Mount Type

-W Approx. 2 HRR018-W Approx. 4 HRR024-W Approx. 5 HRR030-W Approx. 6 HRR050-W Approx. 10 Electric conductivity (25C) [S/cm] 100*1 to 300*1 v v Refer to Facility water system in the specifications.

VXP21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Connection Applicable model VXP2142-03 VXP2142-04 VXP2152-06 VXP2262-10 Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Size Class B Class H G PAX C D, T G, C S T 3 8 1 2 3 4 S L, Z S L, Z PB

EX510-GPR1.eng

INPUT COM D COM C COM B COM A Settings 2 4 Mounted by screw 54 5 16 70 5 PWR (V) Put Claw 1 of the body under DIN rail and push it upward.

LFE-OMZ0011

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

EX510-GDN1.eng

DC-DC converter (isolated) Pin #1: Brown wire FG +24 V TD+ TD0 V Power supply for output INPUT OUTPUT +24 V 0 V COM D +24 V 0 V +24 V RD+ RD0 V Power supply for input and controlling GW 2 13 12 Wiring (continued) Press fitting Press the cover to the body with plier etc. Confirmation It is completed with a check on 4 latches engaging. 3 NOTE 1.

ZCUK

, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

ZQ

filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions

Fieldbus system (DeviceNet compliant)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93

CL

wire Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

5 Port Solenoid Valve SY Series

18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 66 58.5 Max

Clean Room Rodless Cylinder Series CYP ø15, ø32

V Y7PV Y7P IC circuit 3-wire (PNP) Y59B Y69B 12 V 2-wire Relay, PLC Solid state switch 24 V Y7NW Y7NWV 3-wire (NPN) Grommet Yes 5 V , 12 V Diagnostic indication (2-color indication) IC circuit Y7PWV Y7PW 3-wire (PNP) Y7BWV Y7BW 12 V 2-wire Lead wire length symbols: 0.5 m Nil (Example) Y69B 3 m L Y69BL 5 m Z Y69BZ Auto switches marked with a symbol are produced upon receipt of order.

Space Saving Vacuum Ejector Vacuum Pump System

ZQ-OM00801-D Manifold Vacuum Pump Unit D CE/UKCA -compliant Note 3) CE/UKCA compliant products are not available for 1, 2, 3 and 4. 12 - Doc. no. ZQ-OM00801-D B KQ2S23-M5N1 KQ2S04-M5N1 KQ2S04-M5N1 KQ2S06-M5N KQ2S06-M5N KQ2L04-M5N1 KQ2L23-M5N1 KQ2L04-M5N1 CE/UKCA compliant D CE/UKCA marked Note) CE/UKCA compliant: for DC only. 13 - Doc. no. ZQ-OM00801-D Manifold 14 - Doc. no.

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2