Speed Controller with One-touch Fittings

30.7 Brackets on both sides Brackets on both sides L8 x n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 1 Refer to page 618 for L8. 2 The above figure shows the manifold with controllers connected using two L-brackets and a threaded stud kit for manifold.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 M10 x 1.25 M10 x 1.25 JIS class 2 +1.4 0 mm M5 x 0.8 Specific Product Precautions Be sure to read before handling.

PSE540/560

Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L Material PSE56-: Oil proof 3-wire heavy-duty vinyl cable with air tube (0.2 mm2) Sensor cable PSE56--28: Oil proof 2-wire heavy-duty vinyl cable with air tube (0.2 mm2)

ZSE F/ISE

or more (at 50 VDC) between all lead wires and enclosure 10 to 500 Hz with 1.5 mm amplitude or 98 m/s2, whichever is smaller 980 m/s2 in X, Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 02: R 1/4, M5 x 0.8 T2: NPT 1/4, M5 x 0.8 5-wire oil

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

4/5 Port Air Operated Valve SYJA3000 Series

center SYJA7 403 4 5 3 4 5 01 02 2 x 4.3 (For mounting) 34 8.5 32.6 45.6 2 x M5 x 0.8 (Pilot port) B A 1 1 27 34 B A 13 3 B A 1 1 R1 R2 P 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 17 2 x M5 x 0.8 (Pilot port) 31.5 35 64.1 35 2 x 3.2 (For mounting) Manual override 69.6 14.1 89.2 1/8,1/4 (P , A, B port) Manual override 28 25 21 14 38.1 89.2 54 1/8 (P , R1, R2 port) 40 2 x 1.8 (Bleed

F/ISE

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

A

8 x 1 12.5 x 9.5 x 1.5 16.5 x 12.5 x 2 11 x 9 x 1 Refer to page 1 for pilot valve assembly part number designations. 4 AV2000/3000/4000/5000 Dimensions Grommet: AV00--G, GS DIN terminal: AV00--D, DZ DIN terminal for European use: AV00--Y, YZ L Applicable heavy duty cord O.D.: 6, 8 K A Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

E-P HYREG ® Series VY1 1

02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread)

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

4/5 Port Air Operated Valve Series SYJA3000 1

0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

Soft Start-up Valve AV2000/3000/4000/5000

8 x 1 12.5 x 9.5 x 1.5 16.5 x 12.5 x 2 11 x 9 x 1 Refer to page 1 for pilot valve assembly part number designations. 4 AV2000/3000/4000/5000 Dimensions Grommet: AV00--G, GS DIN terminal: AV00--D, DZ DIN terminal for European use: AV00--Y, YZ L Applicable heavy duty cord O.D.: 6, 8 K A Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage

SYJA3000

120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

Digital Flow Switches, Series PF2A, Series PF2W

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.