Air Slide Table

9 6 45.3 MXQR-JS16 11 67.3 MXQR-BS20 MXQR20 M6 x 20 25 22 17 19 M14 x 1.5 M6 x 18 27 12 17.5 22 46 13 35 10 67.1 MXQR-JS20 12 67.3 MXQR-BS25 MXQR25 M8 x 20 31 22 19 19 M14 x 1.5 M8 x 18 33 12 18 22 54 16 35 10 67.1 MXQR-JS25 1) Size of hexagon socket head bolt 2) Mounting the adjuster on the left side is also available.

Cylinder with Lock Series MNB

1/8 4 19.5 to 500 40 35 10 30 22 8 52 104 38 10 14 16 13 14 16.5 63 12 91 52.5 1/8 4 14 27 to 500 50 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 25, 50, 75, 100, 125, 150

MY1

FC a Work piece Shock absorber EY EC FH a 2.5 4.5 6 4 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) W 60 70 90 100 T 7 12 15 15 S 46.7 67.3 73.2 73.2 h 3.5 4.5 5.5 5.5 FW 46 56 74 74 FH 12 16 22 22 FC 13 17 22 22 FB 33 43 57 57 F 6 6 8 8 EY 47.5 57.5 73 87 EC 6.5 8.5 11.5 12 EB 49 57 74 82 EA 10 10 12 15 E 20 20 25 31 Applicable cylinder MY1B20 MY1B25 MY1B32 MY1B40 Shock absorber model

SYJ3000/5000/7000

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 1-5-79 for dimentions with connector cable. 1-5-58 59 5 Port Solenoid Valve Rubber Seal Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 SV SZ SY G: Approx. 300 H: Approx. 600 (Lead wire length) 63

V

24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 41.8 35.5 22 24 78 ASV510F-04-10S 10 R(PT)1/2 22 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 45.8 37.6 21 23 95 ASV510F-04-12S 12 R(PT)1/2 22 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 45.8 37.6 22 24 100

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: Y Y = X = X = Long shaft side (mm) (mm) Long shaft side Long shaft side Y Y X X Size Size Body (B) Body (B) 10 10 1 to 14 1 to 14 1 to 14 1 to 14 Body (B) Body (A) Body (A) X = X = 15 15 1.5 to 18 1.5 to 18 1.5 to 18 1.5 to 18 Body (A) Y = Y = 20 20 1.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 Short shaft side Short shaft side 30 30 2 to 22 2 to 22 2 to 22 2 to 22 Short

Table of Contents

x n)+78 AL 20 22 18 28 28 52.5 5.3 39 14 3 5 5.5 SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa 84 56 8 11.5 28 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

Sine Cylinder Series REC

19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

141.8[146.2] Approx. 300 (Lead wire length) 91 57.5[64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) 44.5 68.6[75.6] Approx. 300 20 20 20 20 87.6 37.6 122.2[126.6] 81.1 31.1 22 22 22 22 65.1 15.1 161.8 63 63 63 63 160 MAX.10 140 22 22 22 22 31.5 31.5 31.5 31.5 45.9[48.1] 11.5 11.5 11.5 11.5 45 55.9 12 12 12 12 55 25.5 25.5 25.5 25.5 36.1[38.3] Refer to page 563 for dimensions

Sine Cylinder Series REC

19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Magnetically Coupled Rodless Cylinder

D-M9N D-M9P D-M9B 0.5 8 8 7 Lead wire length (m) 3 41 41 38 Auto Switch Internal Circuit D-M9N 5 68 68 63 DC (+) Brown Dimensions Unit: mm D-M9 Switch main circuit Switch main circuit Switch main circuit OUT Black Mounting screw M2.5 x 4 l Slotted set screw Indicator light DC () Blue 2.6 D-M9P 2.7 2.8 4 DC (+) Brown 22 3.2 OUT Black Most sensitive position 6 22 DC () Blue D-M9B OUT (+) Brown

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no