SMC Corporation of America
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(Values at the initial period) Flow Characteristics/Weight Flow characteristics Response time (ms)(1) Weight (2) Series Valve construction High pressure type: 1.0 W Low wattage type: 0.5 W 0.59 2 3 (A R) 1 2 (P A) Model Standard type: 1 W AC (g) Cv Cv C [dm3/(sbar)] b C [dm3/(sbar)] b VQZ100 0.56 VQZ115 0.17 0.14 0.44 0.30 Poppet N.C. valve 25 22 or less 13 or less 10 or less 1.3 VQZ212

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.

-22- 6.3.4 The recommended parameters for each actuator The recommended parameters for each actuator. Please change the parameter values by use of the customer. Refer to LECSS2-T Operation Manual, section 5 for details. Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

16.5 19.5 B 7.5 9.5 10.5 10.5 14.0 17.0 A 33.0 32.0 34.0 27.5 31.5 32.0 B 12.5 14.5 15.5 15.5 19.0 22.0 A 26.5 25.5 27.5 21.0 25.0 25.5 B 6.0 8.0 9.0 9.0 12.5 15.5 A 27.5 26.5 28.5 22.0 26.0 26.5 B 7.0 9.0 10.0 10.0 13.5 16.5 B 4.5 6.5 7.5 7.5 11.0 14.0 A 27 20.5 24.5 25 B 8.5 8.5 12 15 20 25 32 40 50 63 Note) When setting an auto switch, confirm the operation and adjust its mounting

ball Snap ring B Housing Piston rod A Piston rod B Rod cover Head cover Plate Piston A Piston B Bumper A Magnet Bumper bolt Hexagon nut Bumper B Hexagon socket head cap screw Hexagon socket head set screw Snap ring Bumper holder (2) Nickel plated (1) Hard anodized Chromated Chromated Nickel plated Hard chrome plated Nickel plated Nickel plated Nickel plated Note 2) Aluminum alloy for CXSL6

.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V

Note 8) Grommet value. 10 XSA-OMS0001-A Fluid property Face seal fitting / compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 C [dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Threaded ports XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 C [dm3/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.5 b 0.36 0.39 0.42 0.38 0.40 0.15 3.

view of driving cylinder CY1F25 Detailed view of driving cylinder Section A-A Parts list Parts list Description No. 1 2 3 4 5 Note No. 22 23 24 25 26 27 28 Note Description Material Anodized Hard anodized Hard anodized Hard anodized Material Nickel plated Zinc chromated Adjustment bolt Body (rodless cylinder) Body End cover A End cover B Cylinder tube Aluminium alloy Aluminium alloy Aluminium

Double acting PA PA B A PB B A With by-pass Suck back valve Manual Operation-Series LVH N.C. Double acting P PA PA Locking and non-locking types available B A B A PB B A Integral fitting type/Threaded type Manifolds Main applications and fields For shut off For air bleeding N.C.

END 5 Booster Regulator Series VBA Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure fromdrive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 CRB2 90 180 90 180 90 180 90 180 90 180 12 63 3 10 CRBU2 69 (32) 9 52 3 15 A CRB1 56 (25) 9 41 4 B 20 MSU 43 (20) 7 32 3 30 CRJ 36 (17) Operating range at proper mounting position (Lm/2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

[0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0 0 7.3 [0.05] 15 [0.1] 22 [0.15] 29 [0.2] 36 [0.25] 44 [0.3] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] Pilot pressure psi [MPa] Pilot pressure psi [MPa] Pilot pressure psi [MPa] 3 Regulator for Chemical Liquids Series LVR Specications

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

B) Under the above conditions, adjust shim so that the space between the workpiece and the clamping block is about 0 mm. Theoretically there is no clamping force for holding a workpiece under this condition. C) In order to generate clamping force from the state described in step B, insert additional shim.

The initial value is " A: A contact (normally open)(output 1,3) / B: B contact (normally closed) (output 2)".

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68