Compact Cylinder

6.6 10 to 100 M8 x 1.25 11 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 15 20 77 7.5 M10 x 1.5 38.5 17 8 60 9 10 to 100 54 46 M10 x 1.5 14 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 Bore size (mm) Stroke range (mm) 32 40 50 63 RA RB S V W Y 5 to 100 10 7 12 43 43.5 59 5 to 100 10 7 12 43 43.5 67 10 to 100 14 8 17 54 63 83 10 to 100 18 10.5 17 54 63 97 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

MY1

10 1.

Compact

Note 10) A reference value for correcting an error in reciprocal operation. Switch and Acceleration Note) Table 2 Switch no. Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

New

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

4/5 Port Air Operated Valve Series SYJA3000 1

B 11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14

Programless controller (with stroke study) Step motor (servo 24 VDC)

Product Outline . 6 2.1 Product features . 6 2.2 Product configuration . 7 2.3 How to Order . 8 2.4 Option . 9 (1) Actuator cable (5m or less) . 9 (2) Actuator cable (8-20m) . 9 (3) Actuator cable for with lock and sensor (5m or less) . 10 (4) Actuator cable for with lock and sensor (8-20m) . 10 2.5 Startup Procedures . 11 (1) Confirmation of the package content . 11 (2) Installation . 11

F

22.5 15.5 6 29.6 AS221F-U01-06 16.5 15.2 25.3 18.5 8 32.4 AS221F-U01-08 19 18.5 33.1 21 10 15 40.2 AS221F-U01-10 20.9 17 8.9 23.3 14.5 1/4 4 18.5 17.2 32.5 AS221F-U02-04 31.1 32 26.6 39.4 34.4 11 23.9 15.5 6 33.1 AS221F-U02-06 31.3 15.2 27.2 18.5 8 36.4 AS221F-U02-08 33.6 18.5 33.9 21 10 19 43.2 AS221F-U02-10 35.5 19 11 26.4 15.5 3/8 6 23 19.4 37.9 AS321F-U03-06 52.5 37.6 32.6 45 40 15.2

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 10.

Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Purchasing order is available in units of 10 pieces. 2-4-111

REC

M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22 1 4 51 M32 X 2 40 181 10 11 53 53 77 236.5 247 200 to 1000 26.5 4.9-13 Series REC Construction !

MLGP

80 80 80 63 80 63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight

MLGP

80 80 80 63 80 63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight

KP/KPQ/KPG

11 20 12 11 21 15 23 30 40 40 65 D 11 4 4 4 18 10.4 10.4 14 13 M 6 10 10 19.5 12.8 12.8 14 8 A L 4.2 8 17 15.2 18 26 21.5 15.2 (R) 10 19 18.5 29 41 24 18.5 Connection threads H 12 22 20.9 46 58 25 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5